Department of Mechanical Engineering, Chungnam National University, Daejeon 34134, Republic of Korea.
ACS Appl Mater Interfaces. 2020 May 6;12(18):21120-21126. doi: 10.1021/acsami.0c03986. Epub 2020 Apr 27.
We report a reliable and robust method for the fabrication of bioinspired superomniphobic surfaces with precise concave-cap-shaped micropillar arrays. This method includes silicon-based conventional microelectromechanical systems (MEMS) and polymer replication processes. We have elucidated two critical cases of fabrication rules for precise micromachining of a negative-shaped bioinspired silicon master. The fabricated polymeric structure replicated from the semipermanent silicon master based on the design rules exhibited high structural fidelity and robustness. Finally, we validated the superomniphobic properties, structural durability, and long-term stability of the fabricated bioinspired surfaces.
我们报告了一种可靠且稳健的方法，用于制造具有精确凹帽形微柱阵列的仿生超疏液表面。该方法包括基于硅的传统微机电系统（MEMS）和聚合物复制工艺。我们已经阐明了精确加工负形状仿生硅主模型的两个关键制造规则案例。根据设计规则从半永久性硅主模型复制得到的所制造的聚合物结构表现出了高结构保真度和稳健性。最后，我们验证了所制造的仿生表面的超疏液性能、结构耐久性和长期稳定性。
