Tyler Nicola A, Guerber Sylvain, Fowler Daivid, Malhouitre Stephane, Garcia Stephanie, Grosse Philippe, Szelag Bertrand
University Grenoble Alpes and CEA, LETI, Minatec Campus.
University Grenoble Alpes and CEA, LETI, Minatec Campus;
J Vis Exp. 2020 Apr 1(158). doi: 10.3791/60269.
Optical phased arrays (OPAs) can produce low-divergence laser beams and can be used to control the emission angle electronically without the need for moving mechanical parts. This technology is particularly useful for beam steering applications. Here, we focus on OPAs integrated into SiN photonic circuits for a wavelength in the near infrared. A characterization method of such circuits is presented, which allows the output beam of integrated OPAs to be shaped and steered. Furthermore, using a wafer-scale characterization setup, several devices can easily be tested across multiple dies on a wafer. In this way, fabrication variations can be studied, and high-performance devices identified. Typical images of OPA beams are shown, including beams emitted from OPAs with and without a uniform waveguide length, and with varying numbers of channels. In addition, the evolution of output beams during the phase optimization process and beam steering in two dimensions is presented. Finally, a study of the variation in the beam divergence of identical devices is performed with respect to their position on the wafer.
光学相控阵（OPAs）可以产生低发散度的激光束，并且无需移动机械部件就能通过电子方式控制发射角度。这项技术在光束转向应用中特别有用。在此，我们聚焦于集成到氮化硅光子电路中的用于近红外波长的光学相控阵。本文介绍了一种此类电路的表征方法，该方法能够对集成光学相控阵的输出光束进行整形和转向。此外，利用晶圆级表征装置，可以轻松地在晶圆上的多个管芯上测试多个器件。通过这种方式，可以研究制造过程中的变化，并识别出高性能器件。文中展示了光学相控阵光束的典型图像，包括具有均匀波导长度和不具有均匀波导长度以及不同通道数量的光学相控阵发射的光束。此外，还展示了相位优化过程中输出光束的演变以及二维光束转向。最后，针对相同器件在晶圆上的位置，对其光束发散度的变化进行了研究。
