Lim Hyungjun, Jung Sanghee, Ahn Junhyoung, Choi Kee-Bong, Kim Geehong, Kwon Soongeun, Lee Jaejong
Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156 Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, Korea.
Department of Nano-Mechatronics, University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Korea.
Materials (Basel). 2020 Apr 20;13(8):1938. doi: 10.3390/ma13081938.
The effective production of nanopatterned films generally requires a nanopatterned roll mold with a large area. We report on a novel system to fabricate large-area roll molds by recombination of smaller patterned areas in a step-and-repeat imprint lithography process. The process is accomplished in a method similar to liquid transfer imprint lithography (LTIL). The stamp roll with a smaller area takes up the liquid resist by splitting from a donor substrate or a donor roll. The resist is then transferred from a stamp roll to an acceptor roll and stitched together in a longitudinal and, if necessary, in a circumferential direction. During transfer, the nanostructured resist is UV-exposed and crosslinked directly on the acceptor roll. The acceptor roll with the stitched and recombined stamp patterns is ready to be used as a large-area roll mold for roll-based imprinting. A system for this purpose was designed, and its operation was demonstrated taking the example of an acceptor roll of 1 m length and 250 mm diameter, which was covered by 56 patterned areas. Such a system represents an elegant and efficient tool to recombine small patterned areas directly on a large roll mold and opens the way for large-area roll-based processing.
纳米图案化薄膜的有效生产通常需要大面积的纳米图案化辊模。我们报道了一种通过在步进重复压印光刻工艺中重组较小图案区域来制造大面积辊模的新型系统。该工艺以类似于液体转移压印光刻（LTIL）的方法完成。具有较小面积的印章辊通过与供体基板或供体辊分离来吸取液体抗蚀剂。然后将抗蚀剂从印章辊转移到受体辊，并在纵向方向上（如有必要，还在圆周方向上）拼接在一起。在转移过程中，纳米结构抗蚀剂在受体辊上直接进行紫外线曝光和交联。带有拼接和重组印章图案的受体辊可直接用作基于辊压印的大面积辊模。为此设计了一个系统，并以长度为1 m、直径为250 mm且覆盖有56个图案区域的受体辊为例展示了其操作。这样的系统是一种直接在大型辊模上重组小图案区域的简便且高效的工具，为基于辊的大面积加工开辟了道路。
