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径向偏振相移干涉测量法及其在单次n干涉图测量中的应用以及在白光干涉图分析中的潜在用途。

Radial polarizing phase-shifting interferometry with applications to single-shot n interferogram measurements and potential usage for white light interferogram analysis.

作者信息

Toto Arellano Noel Ivan

出版信息

Appl Opt. 2020 Apr 1;59(10):3246-3254. doi: 10.1364/AO.388085.

DOI:10.1364/AO.388085
PMID:32400609
Abstract

In this research, we present an interferometric system to analyze transparent samples using interferograms generated by a phase-shifting radial shear grating interferometer for two cases: the first obtaining simultaneous phase-shifting interferograms using a coherent light source and the second one using sequential phase steps with a white light source. For the first case, the simultaneous interferograms are generated using two optical systems: the first one generates the polarized pattern while the second one consists of a 4 system creating replicas of the output interferograms. By using a 2D sinusoidal phase grating, we have the advantage of obtaining up to nine replicated interferograms, all of them with comparable intensities and having amplitudes modulated by the 2D sinusoidal phase grating diffraction orders as zero-order Bessel's functions. To obtain the optical phase map, several phase shifts are generated by placing a polarizing filter covering each replicated interferogram. We highlight the advantage of using simultaneous interferograms by comparing resulting optical phases processed by a conventional four-step algorithm against those obtained by an implemented =+1 method, reducing errors with noisy interferograms. Results for =7 and =9 cases are presented. In addition, we have tested the setup with white light interference techniques by employing the polarizer radial shearing interferometer; for this case, the optical phase is calculated with the four-step and the three-step algorithms. Results of testing the developed system to examine static and dynamic phase objects are also included.

摘要

在本研究中,我们提出了一种干涉测量系统,用于分析透明样品,该系统使用相移径向剪切光栅干涉仪生成的干涉图,用于两种情况:第一种情况是使用相干光源获得同步相移干涉图,第二种情况是使用白光源的顺序相移。对于第一种情况,同步干涉图由两个光学系统生成:第一个生成偏振图案,第二个由一个4系统组成,用于创建输出干涉图的复制品。通过使用二维正弦相位光栅,我们有优势获得多达九个复制的干涉图,所有这些干涉图具有可比的强度,并且其幅度由二维正弦相位光栅衍射级调制为零阶贝塞尔函数。为了获得光学相位图,通过放置覆盖每个复制干涉图的偏振滤波器来产生几个相移。通过将传统四步算法处理的结果光学相位与通过实现的=+1方法获得的结果光学相位进行比较,我们突出了使用同步干涉图的优势,减少了噪声干涉图的误差。给出了=7和=9情况的结果。此外,我们通过使用偏振器径向剪切干涉仪用白光干涉技术测试了该装置;对于这种情况,使用四步和三步算法计算光学相位。还包括测试所开发系统以检查静态和动态相位物体的结果。

相似文献

1
Radial polarizing phase-shifting interferometry with applications to single-shot n interferogram measurements and potential usage for white light interferogram analysis.径向偏振相移干涉测量法及其在单次n干涉图测量中的应用以及在白光干涉图分析中的潜在用途。
Appl Opt. 2020 Apr 1;59(10):3246-3254. doi: 10.1364/AO.388085.
2
Parallel phase shifting radial shear interferometry with complex fringes and unknown phase shift.具有复杂条纹和未知相移的平行相移径向剪切干涉测量法
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One-shot phase-shifting phase-grating interferometry with modulation of polarization: case of four interferograms.具有偏振调制的单次相移相位光栅干涉测量法:四张干涉图的情况
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