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紫外光固化聚乙二醇接枝梯形结构倍半硅氧烷/聚酰亚胺复合材料中的可调晶相

Tunable Crystalline Phases in UV-Curable PEG-Grafted Ladder-Structured Silsesquioxane/Polyimide Composites.

作者信息

Kim Ryung Il, Shin Ju Ho, Lee Jong Suk, Lee Jung-Hyun, Lee Albert S, Hwang Seung Sang

机构信息

Materials Architecturing Research Center, Korea Institute of Science and Technology, Hwarangno 14-gil 5, Seongbuk Gu, Seoul 02792, Korea.

Department of Chemical and Biological Engineering, Korea University, 5-1 Anam-dong, Seongbuk Gu Seoul 02850, Korea.

出版信息

Materials (Basel). 2020 May 15;13(10):2295. doi: 10.3390/ma13102295.

DOI:10.3390/ma13102295
PMID:32429282
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7287875/
Abstract

A series of UV-curable hybrid composite blends containing a carboxylic acid functionalized polyimidewith varying amounts of high molecular weight (~1 K) PEG-grafted ladder-structured polysilsesquioxanes copolymerized with methacryl groups were fabricated and their structural, thermal, mechanical, and surface properties characterized. At a composite weight ratio of polyimide above 50 wt.%, a stark shift from amorphous to crystalline polyethylene glycol (PEG) phases were observed, accompanied by a drastic increase in both surface moduli and brittleness index. Moreover, fabricated composites were shown to have a wide range water contact angle, 9.8°-73.8°, attesting to the tunable surface properties of these amphiphilic hybrid polymer composites. The enhanced mechanical properties, combined with the utility of tunable surface hydrophilicity allows for the possible use of these hybrid polymer composites to be utilized as photosensitive polyimide negative photoresists for a myriad of semiconductor patterning processes.

摘要

制备了一系列紫外线可固化的杂化复合共混物，其中包含一种羧酸官能化的聚酰亚胺，该聚酰亚胺与不同含量的高分子量（约1 K）聚乙二醇接枝的梯形结构聚倍半硅氧烷与甲基丙烯酸基团共聚，并对其结构、热性能、机械性能和表面性能进行了表征。当聚酰亚胺的复合重量比高于50 wt.%时，观察到从无定形聚乙二醇（PEG）相到结晶相的明显转变，同时表面模量和脆性指数都急剧增加。此外，所制备的复合材料具有9.8°-73.8°的宽范围水接触角，证明了这些两亲性杂化聚合物复合材料的表面性能是可调节的。增强的机械性能，结合可调节的表面亲水性，使得这些杂化聚合物复合材料有可能用作多种半导体图案化工艺的光敏聚酰亚胺负性光刻胶。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/928b8d69de46/materials-13-02295-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/3d10e8389858/materials-13-02295-sch001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/bab78d89656f/materials-13-02295-sch002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/1a5445f54b2e/materials-13-02295-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/27c32f2e8c9d/materials-13-02295-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/e4cc9248ce3d/materials-13-02295-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/1e15ade7e9f0/materials-13-02295-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/208c179f6fb8/materials-13-02295-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/2901952f895d/materials-13-02295-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/41ee7bfcbf2d/materials-13-02295-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/928b8d69de46/materials-13-02295-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/3d10e8389858/materials-13-02295-sch001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/98bbaaf09823/materials-13-02295-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/bab78d89656f/materials-13-02295-sch002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/1a5445f54b2e/materials-13-02295-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/27c32f2e8c9d/materials-13-02295-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/e4cc9248ce3d/materials-13-02295-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/1e15ade7e9f0/materials-13-02295-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/208c179f6fb8/materials-13-02295-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/2901952f895d/materials-13-02295-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/41ee7bfcbf2d/materials-13-02295-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a3ae/7287875/928b8d69de46/materials-13-02295-g009.jpg

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