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通过循环沉积制备纳米结构多孔硅-银复合层及其表征:浸涂与旋涂

Fabrication and characterization of nanostructured porous silicon-silver composite layers by cyclic deposition: dip-coating vs spin-coating.

作者信息

Naveas Nelson, Manso-Silván Miguel, Pulido Ruth, Agulló-Rueda Fernando, Torres-Costa Vicente, Plaza Tanya, Pesenti Héctor, Recio Gonzalo, Hernández-Montelongo Jacobo

机构信息

Departamento de Física Aplicada, Centro de Micro-Análisis de Madrid and Instituto de Ciencia de Materiales Nicolás Cabrera, Universidad Autónoma de Madrid, Madrid 28049, Spain. Departamento de Ingeniería Química y Procesos de Minerales, Universidad de Antofagasta, Avenida Angamos 601, Antofagasta, Chile.

出版信息

Nanotechnology. 2020 Sep 4;31(36):365704. doi: 10.1088/1361-6528/ab96e5. Epub 2020 May 27.

Abstract

Composites of nanostructured porous silicon and silver (nPSi-Ag) have attracted great attention due to the wide spectrum of applications in fields such as microelectronics, photonics, photocatalysis and bioengineering, Among the different methods for the fabrication of nanostructured composite materials, dip and spin-coating are simple, versatile, and cost-effective bottom-up technologies to provide functional coatings. In that sense, we aimed at fabricating nPSi-Ag composite layers. Using nPSi layers with pore diameter of 30 nm, two types of thin-film techniques were systematically compared: cyclic dip-coating (CDC) and cyclic spin-coating (CSC). CDC technique formed a mix of granular and flake-like structures of metallic Ag, and CSC method favored the synthesis of flake-like structures with Ag and AgO phases. Flakes obtained by CDC and CSC presented a width of 110 nm and 70 nm, respectively. Particles also showed a nanostructure surface with features around 25 nm. According to the results of EDX and RBS, integration of Ag into nPSi was better achieved using the CDC technique. SERS peaks related to chitosan adsorbed on Ag nanostructures were enhanced, especially in the nPSi-Ag composite layers fabricated by CSC compared to CDC, which was confirmed by FTDT simulations. These results show that CDC and CSC produce different nPSi-Ag composite layers for potential applications in bioengineering and photonics.

摘要

纳米结构多孔硅与银的复合材料(nPSi-Ag)因其在微电子、光子学、光催化和生物工程等领域的广泛应用而备受关注。在制备纳米结构复合材料的不同方法中,浸涂和旋涂是简单、通用且经济高效的自下而上技术,可用于提供功能涂层。从这个意义上讲,我们旨在制备nPSi-Ag复合层。使用孔径为30 nm的nPSi层,系统地比较了两种薄膜技术:循环浸涂(CDC)和循环旋涂(CSC)。CDC技术形成了金属Ag的颗粒状和片状结构的混合物,而CSC方法则有利于合成具有Ag和AgO相的片状结构。通过CDC和CSC获得的薄片宽度分别为110 nm和70 nm。颗粒还呈现出具有约25 nm特征的纳米结构表面。根据EDX和RBS的结果,使用CDC技术能更好地实现Ag与nPSi的整合。与吸附在Ag纳米结构上的壳聚糖相关的SERS峰得到增强,特别是在通过CSC制备的nPSi-Ag复合层中,与CDC相比,FTDT模拟证实了这一点。这些结果表明,CDC和CSC产生不同的nPSi-Ag复合层,可用于生物工程和光子学的潜在应用。

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