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利用飞秒激光贝塞尔光束辅助热氧化制备具有抗反射特性的三维表面。

Creating a three-dimensional surface with antireflective properties by using femtosecond-laser Bessel-beam-assisted thermal oxidation.

作者信息

Li Xiaowei, Xu Zhijie, Jiang Lan, Shi Yaoming, Wang Andong, Huang Lingling, Wei Qunshuo

出版信息

Opt Lett. 2020 Jun 1;45(11):2989-2992. doi: 10.1364/OL.394998.

DOI:10.1364/OL.394998
PMID:32479440
Abstract

Metal surfaces with low reflectance have received considerable attention for their great optical, electrical, and thermal properties. However, the difficulty in achieving low reflectance on curved metal surfaces has hindered their practical applications. We propose a rapid and flexible method for processing a three-dimensional surface with antireflective properties. A Bessel beam created using an axicon is employed to generate ripple structures on the curved surface, thereby assisting subsequent thermal oxidation. Ripple structures coated with oxide semiconductor nanowires are then processed on a Cu substrate, thus further reducing reflectance. Antireflective properties with a minimum reflectance of less than 0.015 at a wavelength of 500-1200 nm could be achieved by using this method. This presented approach reduces dimensionality in laser processing, subsequently improving processing efficiency, and provides a foundation for the practical application of metal antireflective surfaces.

摘要

具有低反射率的金属表面因其优异的光学、电学和热学性能而受到广泛关注。然而,在弯曲金属表面实现低反射率的困难阻碍了它们的实际应用。我们提出了一种快速且灵活的方法来加工具有抗反射特性的三维表面。使用轴棱锥产生的贝塞尔光束用于在曲面上生成波纹结构,从而辅助后续的热氧化。然后在铜基板上加工涂覆有氧化物半导体纳米线的波纹结构,进一步降低反射率。通过这种方法,在500 - 1200 nm波长下可实现最低反射率小于0.015的抗反射特性。这种方法降低了激光加工的维度,进而提高了加工效率,并为金属抗反射表面的实际应用奠定了基础。

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