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利用光辅助二次电子发射探测表面光电压效应

Probing Surface Photovoltage Effect Using Photoassisted Secondary Electron Emission.

作者信息

Li Yu, Choudhry Usama, Ranasinghe Jeewan, Ackerman Alex, Liao Bolin

机构信息

Department of Mechanical Engineering, University of California, Santa Barbara, California 93110, United States.

出版信息

J Phys Chem A. 2020 Jun 25;124(25):5246-5252. doi: 10.1021/acs.jpca.0c02543. Epub 2020 Jun 15.

Abstract

While the properties of surfaces and interfaces are crucial to modern devices, they are commonly difficult to explore since the signal from the bulk often masks the surface contribution. Here we introduce a methodology based on scanning electron microscopy (SEM) coupled with a pulsed laser source, which offers the capability to sense the topmost layer of materials, to study the surface photovoltage (SPV) related effects. This method relies on a pulsed optical laser to transiently induce an SPV and a continuous primary electron beam to produce secondary electron (SE) emission and monitor the change of the SE yield under laser illumination. We observe contrasting behaviors of the SPV-induced SE yield change on n-type and p-type semiconductors. We further study the dependence of the SPV-induced SE yield on the primary electron beam energy, the optical fluence, and the modulation frequency of the optical excitation, which reveal the details of the dynamics of the photocarriers in the presence of the surface built-in potential. This fast, contactless, and bias-free technique offers a convenient and robust platform to probe surface electronic phenomena, with great promise to probe nanoscale effects with a high spatial resolution. Our result further provides a basis to understand the contrast mechanisms of emerging time-resolved electron microscopic techniques, such as the scanning ultrafast electron microscopy.

摘要

虽然表面和界面的性质对现代器件至关重要,但由于体相信号常常掩盖表面贡献,它们通常难以探究。在此,我们介绍一种基于扫描电子显微镜(SEM)与脉冲激光源相结合的方法,该方法能够探测材料的最顶层,以研究与表面光电压(SPV)相关的效应。此方法依靠脉冲光学激光瞬态诱导产生表面光电压,并利用连续的一次电子束产生二次电子(SE)发射,以及监测激光照射下二次电子产额的变化。我们观察到在n型和p型半导体上,表面光电压诱导的二次电子产额变化呈现出截然不同的行为。我们进一步研究了表面光电压诱导的二次电子产额对一次电子束能量、光通量以及光激发调制频率的依赖性,这些研究揭示了在存在表面内建电势的情况下光生载流子动力学的细节。这种快速、非接触且无偏置的技术为探测表面电子现象提供了一个便捷且可靠的平台,极有希望以高空间分辨率探测纳米尺度的效应。我们的结果进一步为理解诸如扫描超快电子显微镜等新兴的时间分辨电子显微镜技术的对比机制提供了基础。

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