Chen Gang
College of Mechanical Engineering, Chongqing University, Chongqing 400044, People's Republic of China.
Rev Sci Instrum. 2020 Jun 1;91(6):065108. doi: 10.1063/5.0001660.
Circular grating usually served as the angle displacement feedback element in a precision turntable, and its measurement accuracy is very important. Installation errors always exist in the measurement system, which can cause angle measurement errors. Angle measurement errors are an impediment to improve the angle positioning precision of a turntable. It is necessary to reduce the effect of installation errors. In this paper, a novel method was proposed to improve the angle measurement accuracy of circular grating, which is based on compressed sensing and sparsity decomposition. An experimental system was built to verify the effectiveness of the proposed approach. The experimental results validate that the proposed method can effectively improve the angle measurement accuracy of circular grating.
圆形光栅通常作为精密转台的角位移反馈元件,其测量精度非常重要。测量系统中总是存在安装误差,这会导致角度测量误差。角度测量误差是提高转台角度定位精度的一个障碍。有必要降低安装误差的影响。本文提出了一种基于压缩感知和稀疏分解的提高圆形光栅角度测量精度的新方法。搭建了一个实验系统来验证所提方法的有效性。实验结果验证了所提方法能有效提高圆形光栅的角度测量精度。