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高温下原位扫描电子显微镜(SEM)实验成像的研究。

An investigation into experimental in situ scanning electron microscope (SEM) imaging at high temperature.

作者信息

Heard Rhiannon, Huber John E, Siviour Clive, Edwards Gary, Williamson-Brown Ed, Dragnevski Kalin

机构信息

Solid Mechanics Group, Department of Engineering Science, University of Oxford, Parks Road, Oxford OX1 3PJ, United Kingdom.

Deben United Kingdom Ltd., Brickfields Business Park, Old Stowmarket Road, Woolpit, Bury St Edmunds, Suffolk IP30 9QS, United Kingdom.

出版信息

Rev Sci Instrum. 2020 Jun 1;91(6):063702. doi: 10.1063/1.5144981.

Abstract

This paper presents an investigation into high temperature imaging of metals through the use of a novel heat stage for in situ Scanning Electron Microscopy (SEM). The results obtained demonstrate the benefits and challenges of SEM imaging at elevated temperatures of up to 850 °C using Secondary Electron (SE) and Electron Backscatter Diffraction (EBSD) detectors. The data collected using the heat stage demonstrate good beam, vacuum, and detector stability at high temperatures without the need for shielding or detector modification owing to the heat stage geometry. SE imaging highlighted one possible application: carrying out thermal etching, a process in which surface grooves form along a material's grain boundaries during heating in situ. The data suggest that using the heat stage to perform imaging during the process gives a more accurate representation of a material's microstructure at temperature than examining the thermally etched specimen after cooling. This study also highlights some of the challenges of high temperature in situ EBSD imaging in both steel and nickel at a variety of temperatures and time scales. In particular, the data demonstrate the effect of surface roughness on EBSD imaging and how microstructural changes during heating may affect this. Additionally, the ease with which a material can be imaged using EBSD at temperature may be affected by the material's magnetic properties. For the first time, it is shown that at temperatures close to the Curie temperature of ferromagnetic materials, in this case Nickel, there is a loss of EBSD image quality. Quality was regained when temperatures were further increased. Despite these challenges, good quality EBSD scans were produced, further highlighting the benefits of in situ testing for providing information on grain boundaries, orientations, and phase change at elevated temperatures.

摘要

本文介绍了一项通过使用新型加热台进行原位扫描电子显微镜(SEM)对金属进行高温成像的研究。所获得的结果展示了在高达850°C的高温下使用二次电子(SE)和电子背散射衍射(EBSD)探测器进行SEM成像的优势和挑战。使用加热台收集的数据表明,由于加热台的几何结构,在高温下无需屏蔽或对探测器进行修改即可实现良好的电子束、真空和探测器稳定性。SE成像突出了一个可能的应用:进行热蚀刻,即在原位加热过程中,沿着材料的晶界形成表面沟槽的过程。数据表明,在该过程中使用加热台进行成像,相较于冷却后检查热蚀刻试样,能更准确地呈现材料在高温下的微观结构。本研究还突出了在各种温度和时间尺度下,对钢和镍进行高温原位EBSD成像的一些挑战。特别是,数据展示了表面粗糙度对EBSD成像的影响,以及加热过程中的微观结构变化可能如何影响这一点。此外,材料在高温下使用EBSD成像的难易程度可能会受到材料磁性的影响。首次表明,在接近铁磁材料居里温度的温度下,在这种情况下是镍,EBSD图像质量会下降。当温度进一步升高时,图像质量得以恢复。尽管存在这些挑战,但仍产生了高质量的EBSD扫描结果,进一步突出了原位测试在提供高温下晶界、取向和相变信息方面的优势。

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