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用于动态薄膜干涉测量的高光谱成像

Hyperspectral imaging for dynamic thin film interferometry.

作者信息

Chandran Suja V, Sentmanat J, Hofmann G, Scales C, Fuller G G

机构信息

Department of Chemical Engineering, Stanford University, Stanford, California, 94305, USA.

Department of Mechanical Engineering, Texas A&M University, College Station, Texas, 77843, USA.

出版信息

Sci Rep. 2020 Jul 9;10(1):11378. doi: 10.1038/s41598-020-68433-0.

DOI:10.1038/s41598-020-68433-0
PMID:32647349
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7347853/
Abstract

Dynamic thin film interferometry is a technique used to non-invasively characterize the thickness of thin liquid films that are evolving in both space and time. Recovering the underlying thickness from the captured interferograms, unconditionally and automatically is still an open problem. Here we report a compact setup employing a snapshot hyperspectral camera and the related algorithms for the automated determination of thickness profiles of dynamic thin liquid films. The proposed technique is shown to recover film thickness profiles to within 100 nm of accuracy as compared to those profiles reconstructed through the manual color matching process. Subsequently, we discuss the characteristics and advantages of hyperspectral interferometry including the increased robustness against imaging noise as well as the ability to perform thickness reconstruction without considering the absolute light intensity information.

摘要

动态薄膜干涉测量法是一种用于非侵入性地表征在空间和时间上都不断变化的薄液膜厚度的技术。从捕获的干涉图中无条件且自动地恢复其潜在厚度仍然是一个未解决的问题。在此,我们报告了一种紧凑的装置,该装置采用快照高光谱相机以及用于自动确定动态薄液膜厚度分布的相关算法。与通过手动颜色匹配过程重建的厚度分布相比,所提出的技术能够将薄膜厚度分布恢复到精度在100纳米以内。随后,我们讨论了高光谱干涉测量法的特点和优势,包括对成像噪声的鲁棒性增强以及在不考虑绝对光强信息的情况下进行厚度重建的能力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d864/7347853/05d87213dbc0/41598_2020_68433_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d864/7347853/4d59dfd44342/41598_2020_68433_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d864/7347853/3a676ef2fd87/41598_2020_68433_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d864/7347853/6d280bc67498/41598_2020_68433_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d864/7347853/05d87213dbc0/41598_2020_68433_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d864/7347853/4d59dfd44342/41598_2020_68433_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d864/7347853/3a676ef2fd87/41598_2020_68433_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d864/7347853/6d280bc67498/41598_2020_68433_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d864/7347853/05d87213dbc0/41598_2020_68433_Fig4_HTML.jpg

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