Jang Joohee, Parmar Narendra S, Choi Won-Kook, Choi Ji-Won
Center for Electronic Materials, Korea Institute of Science and Technology (KIST), 5, Hwarang-ro 14 gil, Seongbuk-gu, Seoul 02792, Republic of Korea.
Division of Nano & Information Technology, KIST School, University of Science and Technology (UST), 217, Gajeong-ro, Yuseong-gu, Daejeon 34113, Republic of Korea.
ACS Appl Mater Interfaces. 2020 Aug 26;12(34):38406-38414. doi: 10.1021/acsami.0c10852. Epub 2020 Aug 12.
Zn-doped SnO/Ag/Zn-doped SnO(ZTO/Ag/ZTO) multilayer thin films fabricated on a polyethylene terephthalate (PET) substrate using an optimized N-to-(Ar + O) gas ratio are used for transparent thin-film heaters with high performance and chemical stability. The ZTO/Ag/ZTO-based multilayer thin film exhibits enhanced durability at high temperatures and humid environments by incorporating nitrogen. The bending test results-there was no significant change in the sheet resistance even after 10,000 bending cycles-highlight the mechanical flexibility of the ZTO/Ag/ZTO multilayer thin film. The ZTO/Ag/ZTO-based thin-film heater on PET, fabricated under optimized deposition gas conditions, exhibits a fast thermal response time of 30 s and a low driving voltage of 6 V to attain 100 °C. It also exhibits uniform heat distribution at saturated temperature and chemical stability after 100 heating-cooling cycles. Hence, the proposed ZTO/Ag/ZTO-based thin-film heater is applicable for use in front and rear window automobile and building applications.
采用优化的氮气与（氩气+氧气）气体比例在聚对苯二甲酸乙二酯（PET）基板上制备的掺锌氧化锡/银/掺锌氧化锡（ZTO/Ag/ZTO）多层薄膜，被用于高性能且具有化学稳定性的透明薄膜加热器。通过掺入氮元素，基于ZTO/Ag/ZTO的多层薄膜在高温和潮湿环境下展现出更高的耐久性。弯曲测试结果——即使经过10000次弯曲循环，薄膜电阻也没有显著变化——突出了ZTO/Ag/ZTO多层薄膜的机械柔韧性。在优化的沉积气体条件下制备的基于PET的ZTO/Ag/ZTO薄膜加热器，具有30秒的快速热响应时间和6伏的低驱动电压，可达到100°C。在100次加热-冷却循环后，它在饱和温度下还表现出均匀的热分布和化学稳定性。因此，所提出的基于ZTO/Ag/ZTO的薄膜加热器适用于汽车前后窗和建筑应用。
