Yan Xiongshuo, Liu Yi'an, Ge Licheng, Zhu Bing, Wu Jiangwei, Chen Yuping, Chen Xianfeng
Opt Lett. 2020 Aug 1;45(15):4100-4103. doi: 10.1364/OL.394171.
Lithium tantalate (LT) is one of the most attractive optical nonlinear materials, as it possesses a high optical damage threshold and great UV transparency (0.28-5.5 µm). Recently, optical grade LT nanoscale film was developed. Here a high-quality-factor (∼10) LT microdisk resonator based on LT-on-insulator (LTOI) film is fabricated by utilizing focused ion beam (FIB) milling. 2 µW output second-harmonic waves are achieved in the LTOI microdisk at about 500 mW input power. Cascaded third-harmonic generation is also observed in the fabricated device. This work may pave the way for LTOI in integrated photonic chips.
钽酸锂（LT）是最具吸引力的光学非线性材料之一，因为它具有高光学损伤阈值和良好的紫外透明度（0.28 - 5.5 µm）。最近，开发出了光学级LT纳米级薄膜。在此，通过聚焦离子束（FIB）铣削制备了基于绝缘体上LT（LTOI）薄膜的高品质因数（约10）LT微盘谐振器。在LTOI微盘中，输入功率约500 mW时实现了2 µW的输出二次谐波。在制造的器件中还观察到了级联三次谐波产生。这项工作可能为LTOI在集成光子芯片中的应用铺平道路。
