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利用卷积神经网络和斯特列尔比选择最佳 STEM 汇聚角。

Optimal STEM Convergence Angle Selection Using a Convolutional Neural Network and the Strehl Ratio.

机构信息

Department of Materials Science and Engineering, University of Michigan, Ann Arbor, MI48019, USA.

Department of Materials Science and Engineering, Cornell University, Ithaca, NY14853, USA.

出版信息

Microsc Microanal. 2020 Oct;26(5):921-928. doi: 10.1017/S1431927620001841.

DOI:10.1017/S1431927620001841
PMID:32758324
Abstract

The selection of the correct convergence angle is essential for achieving the highest resolution imaging in scanning transmission electron microscopy (STEM). The use of poor heuristics, such as Rayleigh's quarter-phase rule, to assess probe quality and uncertainties in the measurement of the aberration function results in the incorrect selection of convergence angles and lower resolution. Here, we show that the Strehl ratio provides an accurate and efficient way to calculate criteria for evaluating the probe size for STEM. A convolutional neural network trained on the Strehl ratio is shown to outperform experienced microscopists at selecting a convergence angle from a single electron Ronchigram using simulated datasets. Generating tens of thousands of simulated Ronchigram examples, the network is trained to select convergence angles yielding probes on average 85% nearer to optimal size at millisecond speeds (0.02% of human assessment time). Qualitative assessment on experimental Ronchigrams with intentionally introduced aberrations suggests that trends in the optimal convergence angle size are well modeled but high accuracy requires a high number of training datasets. This near-immediate assessment of Ronchigrams using the Strehl ratio and machine learning highlights a viable path toward the rapid, automated alignment of aberration-corrected electron microscopes.

摘要

在扫描透射电子显微镜(STEM)中,选择正确的会聚角对于实现最高分辨率成像是至关重要的。使用不良的启发式方法(如瑞利的四分之一相位规则)来评估探针质量和像差测量中的不确定性,会导致会聚角的选择不正确和分辨率降低。在这里,我们表明,斯特列尔比提供了一种准确而高效的方法来计算评估 STEM 探针尺寸的标准。使用模拟数据集,经过训练的基于斯特列尔比的卷积神经网络在从单个电子 Ronchigram 中选择会聚角方面表现优于有经验的显微镜专家。该网络生成了数万张模拟 Ronchigram 示例,经过训练以选择会聚角,使探针的平均尺寸接近最佳尺寸的 85%,速度为毫秒级(人类评估时间的 0.02%)。对具有故意引入像差的实验 Ronchigram 的定性评估表明,对最佳会聚角尺寸的趋势进行了很好的建模,但高精度需要大量的训练数据集。使用斯特列尔比和机器学习对 Ronchigram 进行近乎即时的评估,突出了一种可行的方法,可以快速、自动对准校正像差的电子显微镜。

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