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通过在形貌预图案上进行受控去湿对聚合物薄膜进行纳米图案化。

Nanopatterning of thin polymer films by controlled dewetting on a topographic pre-pattern.

作者信息

Yoon Bokyung, Acharya Himadri, Lee Geuntak, Kim Ho-Cheol, Huh June, Park Cheolmin

机构信息

Department of Materials Science and Engineering, Yonsei University, Seoul, Korea.

Almaden Research Center, 650 Harry Road, San Jose, CA 95120, USA.

出版信息

Soft Matter. 2008 Jun 20;4(7):1467-1472. doi: 10.1039/b800121a.

DOI:10.1039/b800121a
PMID:32907113
Abstract

We develop a non-lithographic method for fabricating ordered micro/nanostructures of polymer thin films based on controlled dewetting of the films on topographically pre-patterned substrates with a large area. An ordered nanopattern of polystyrene (PS) is accomplished by thermal treatment of a thin PS film above its Tg spin coated on a topographically patterned substrate. We investigate the influence of pattern geometry on the final morphology of the dewetted polymer films using both mesa and indent patterned substrates. The controlled dewetting, initiated preferentially at the edges of individual pre-patterned mesas, in particular gives rise to spherical cap domains located at the center of the mesas. The domains are much smaller than the individual mesas as a consequence of the significant pattern reduction to nearly 300%. The arrays of 70 nm PS nano-sphere caps are obtained from arrays of 200 nm square pre-patterned mesas. Our method is also applicable for other polymers such as a poly(4-vinyl pyridine) (P4VP) containing Rhodamine 6G (Rh6G) dye on a pre-patterned PS substrate and successfully produced highly fluorescent stable nanopatterned films.

摘要

我们开发了一种非光刻方法,用于在具有大面积的地形预图案化衬底上基于聚合物薄膜的受控去湿来制造聚合物薄膜的有序微/纳米结构。通过对旋涂在地形图案化衬底上的聚苯乙烯(PS)薄膜在其玻璃化转变温度(Tg)以上进行热处理,实现了PS的有序纳米图案。我们使用台面和凹痕图案化衬底研究了图案几何形状对去湿聚合物薄膜最终形态的影响。受控去湿优先在各个预图案化台面的边缘开始,特别产生位于台面中心的球冠域。由于图案显著缩小至近300%,这些域比单个台面小得多。从200nm方形预图案化台面阵列获得了70nm PS纳米球冠阵列。我们的方法也适用于其他聚合物,例如在预图案化PS衬底上含有罗丹明6G(Rh6G)染料的聚(4-乙烯基吡啶)(P4VP),并成功制备了高荧光稳定的纳米图案化薄膜。

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