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基于具有可移动气隙的金属-绝缘体-金属超材料的表面等离子体耦合光学力传感器。

Surface-plasmon-coupled optical force sensors based on metal-insulator-metal metamaterials with movable air gap.

作者信息

Okatani Taiyu, Sekiguchi Shota, Hane Kazuhiro, Kanamori Yoshiaki

机构信息

Department of Robotics, Tohoku University, Sendai, 980-8579, Japan.

Department of Finemechanics, Tohoku University, Sendai, 980-8579, Japan.

出版信息

Sci Rep. 2020 Sep 9;10(1):14807. doi: 10.1038/s41598-020-71825-x.

DOI:10.1038/s41598-020-71825-x
PMID:32908178
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7481775/
Abstract

We proposed surface-plasmon-coupled optical force sensors based on metal-insulator-metal (MIM) metamaterials with a movable air gap as an insulator layer. The MIM metamaterial was composed of an air gap sandwiched by a metal nanodot array and a metal diaphragm, the resonant wavelength of which was red-shifted when the air gap was narrowed by applying a normal force. We designed and fabricated a prototype of the proposed sensor and confirmed that the MIM metamaterial could be used as a force sensor with larger sensitivity than a force sensor based on Fabry-Pérot interferometer (FPI).

摘要

我们提出了基于金属-绝缘体-金属（MIM）超材料的表面等离子体耦合光学力传感器，该超材料具有可移动的气隙作为绝缘层。MIM超材料由夹在金属纳米点阵列和金属膜片之间的气隙组成，当通过施加法向力使气隙变窄时，其共振波长会发生红移。我们设计并制作了所提出传感器的原型，并证实MIM超材料可作为一种力传感器，其灵敏度高于基于法布里-珀罗干涉仪（FPI）的力传感器。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33c9/7481775/843287a8a705/41598_2020_71825_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33c9/7481775/a4dafa35a091/41598_2020_71825_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33c9/7481775/7e82cb91882c/41598_2020_71825_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33c9/7481775/e96f3fba10b3/41598_2020_71825_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33c9/7481775/843287a8a705/41598_2020_71825_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33c9/7481775/a4dafa35a091/41598_2020_71825_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33c9/7481775/7e82cb91882c/41598_2020_71825_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33c9/7481775/e96f3fba10b3/41598_2020_71825_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/33c9/7481775/843287a8a705/41598_2020_71825_Fig4_HTML.jpg

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