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基于多焦点微透镜的曲面复眼的制造与表征

Fabrication and Characterization of Curved Compound Eyes Based on Multifocal Microlenses.

作者信息

Lian Gaoge, Liu Yongshun, Tao KeKai, Xing Huaming, Huang Ruxia, Chi Mingbo, Zhou Wenchao, Wu Yihui

机构信息

State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, (CIOMP), Chinese Academy of Sciences, Changchun 130033, China.

University of Chinese Academy of Sciences, Beijing 100039, China.

出版信息

Micromachines (Basel). 2020 Sep 16;11(9):854. doi: 10.3390/mi11090854.

Abstract

Curved compound eyes have generated great interest owing to the wide field of view but the application of devices is hindered for the lack of proper detectors. One-lens curved compound eyes with multi-focal microlenses provide a solution for wide field imaging integrated in a commercial photo-detector. However, it is still a challenge for manufacturing this kind of compound eye. In this paper, a rapid and accurate method is proposed by a combination of photolithography, hot embossing, soft photolithography, and gas-assisted deformation techniques. Microlens arrays with different focal lengths were firstly obtained on a polymer, and then the planar structure was converted to the curved surface. A total of 581 compound eyes with diameters ranging from 152.8 µm to 240.9 µm were successfully obtained on one curved surface within a few hours, and the field of view of the compound eyes exceeded 108°. To verify the characteristics of the fabricated compound eyes, morphology deviation was measured by a probe profile and a scanning electron microscope. The optical performance and imaging capability were also tested and analyzed. As a result, the ommatidia made up of microlenses showed not only high accuracy in morphology, but also imaging uniformity on a focal plane. This flexible massive fabrication of compound eyes indicates great potential for miniaturized imaging systems.

摘要

弯曲复眼因其广阔的视野而备受关注,但由于缺乏合适的探测器,其在设备中的应用受到阻碍。带有多焦点微透镜的单透镜弯曲复眼为集成在商用光电探测器中的宽视野成像提供了解决方案。然而,制造这种复眼仍然是一个挑战。在本文中,通过光刻、热压印、软光刻和气体辅助变形技术相结合的方法,提出了一种快速且精确的制造方法。首先在聚合物上获得具有不同焦距的微透镜阵列,然后将平面结构转换为曲面。在几个小时内,在一个曲面上成功获得了581个直径范围从152.8 µm到240.9 µm的复眼,并且复眼的视野超过了108°。为了验证所制造复眼的特性,通过探针轮廓仪和扫描电子显微镜测量了形态偏差。还对光学性能和成像能力进行了测试和分析。结果,由微透镜组成的小眼不仅在形态上具有高精度,而且在焦平面上具有成像均匀性。这种灵活的复眼大规模制造表明了其在小型化成像系统中的巨大潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1c4/7569987/69d95d1d86a5/micromachines-11-00854-g008.jpg

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