Department of Material Science and Engineering, College of Engineering and Key Laboratory of Polymer Chemistry, and Physics of Ministry of Education, Peking University, Beijing, 100871, P. R. China.
College of Chemistry and Molecular Engineering, Zhengzhou University, Zhengzhou, 450001, P. R. China.
Chempluschem. 2020 Sep;85(9):2166-2176. doi: 10.1002/cplu.202000495.
Nanofabrication on soft polymeric surfaces is an essential process in many fields, for example, chip manufacturing, microfluidics, high efficiency solar cells, and anticounterfeiting. In order to achieve these applications, various nanofabrication methods have been explored. Among them, nanoimprint lithography (NIL) has drawn worldwide attention because of its cheap and fast processability. In this minireview, an overview of azopolymer-based NIL is provided. Since their discovery, azopolymers have demonstrated versatile photoresponsive characteristics due to their unique physical and chemical properties that originate from the photoisomerization of azobenzene chromophores. As such, two aspects are reported in this minireview. On the one hand, various azopolymers showing photofluidization and photoswitchable glass transition temperatures have been developed, thus facilitating methodological advancements in NIL. On the other hand, these on-demand NIL methods provide greater opportunities for azopolymer-based applications, such as templating of optics, directional photo-manipulation of nanopatterns, and micro photo-actuators. Also the challenges are discussed that remain in this field.
在软聚合物表面进行纳米制造是许多领域的基本过程，例如芯片制造、微流控、高效太阳能电池和防伪。为了实现这些应用，已经探索了各种纳米制造方法。其中，纳米压印光刻（NIL）因其廉价且快速的可加工性而引起了全球的关注。在这篇综述中，提供了基于偶氮聚合物的 NIL 的概述。自从它们被发现以来，由于偶氮苯发色团的光致异构化产生的独特物理和化学性质，偶氮聚合物表现出了多种多样的光响应特性。因此，在这篇综述中报告了两个方面。一方面，已经开发出了各种显示光致流动和光致可切换玻璃化转变温度的偶氮聚合物，从而促进了 NIL 方法的进展。另一方面，这些按需 NIL 方法为基于偶氮聚合物的应用提供了更多机会，例如光学模板、纳米图案的定向光操纵和微光致动器。还讨论了该领域仍然存在的挑战。
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