Qiao Qifeng, Yazici Mahmut Sami, Dong Bowei, Liu Xinmiao, Lee Chengkuo, Zhou Guangya
Opt Lett. 2020 Oct 1;45(19):5620-5623. doi: 10.1364/OL.400132.
We demonstrate a multifunctional photonic switch on silicon-on-insulator platform operating at the mid-infrared wavelength range (3.85-4.05 µm) using suspended waveguides with sub-wavelength cladding and a micro-electro-mechanical systems (MEMS) tunable waveguide coupler. Leveraging the flip-chip bonding technology, a top wafer acting as the electrode is assembled above the silicon-on-insular wafer to enable the electrostatic actuation. Experimental characterizations for the functions of the proposed device include (1) an optical attenuator with 25 dB depth using DC voltage actuation, (2) a 1×2 optical switch with response time of 8.9 µs and -3 bandwidth up to 127 kHz using AC voltage actuation, and (3) an on-chip integrated light chopper with the comparable performance of a commercial rotating disc light chopper.
我们展示了一种基于绝缘体上硅平台的多功能光子开关，该开关工作在中红外波长范围（3.85 - 4.05 µm），采用具有亚波长包层的悬浮波导和微机电系统（MEMS）可调谐波导耦合器。利用倒装芯片键合技术，将用作电极的顶部晶圆组装在绝缘硅晶圆上方，以实现静电驱动。对所提出器件功能的实验表征包括：（1）使用直流电压驱动的深度为25 dB的光衰减器；（2）使用交流电压驱动的响应时间为8.9 µs且 - 3 dB带宽高达127 kHz的1×2光开关；（3）具有与商用旋转盘式光斩波器相当性能的片上集成光斩波器。
