Zhou Bin, Jia Wei, Sun Peng, Wang Jin, Liu Weicheng, Zhou Changhe
Opt Express. 2020 Sep 28;28(20):28810-28818. doi: 10.1364/OE.402131.
In this paper, we propose a reflective two-dimensional (2D) metal-dielectric grating based on cylindrical hole nano arrays with excellent polarization-independent high diffraction efficiency. The effects of the geometrical parameters on the polarization characteristic and diffraction efficiency are studied. Optimized results show that the (-1, 0) order diffraction efficiency of transverse electric (TE) and transverse magnetic (TM) polarizations under Littrow mounting is 98.31% and 98.05% at 780 nm incident wavelength, and the diffraction efficiency equilibrium is 99.74%, which is a significant improvement over the previously reported 2D gratings. The high efficiency in both TE and TM polarizations makes it a potential candidate as planar grating rulers for high precision multi-axis displacement measurement. Moreover, the cylindrical hole-based structure performs well in manufacturing tolerances, which provides the possibility for practical applications.
在本文中，我们提出了一种基于圆柱孔纳米阵列的反射式二维（2D）金属 - 电介质光栅，其具有优异的偏振无关高衍射效率。研究了几何参数对偏振特性和衍射效率的影响。优化结果表明，在 Littrow 装置下，当入射波长为 780 nm 时，横向电（TE）偏振和横向磁（TM）偏振的（-1, 0）级衍射效率分别为 98.31%和 98.05%，衍射效率平衡为 99.74%，这比先前报道的二维光栅有显著提高。TE 和 TM 偏振的高效率使其成为高精度多轴位移测量平面光栅尺的潜在候选者。此外，基于圆柱孔的结构在制造公差方面表现良好，这为实际应用提供了可能性。
