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基于开放式阶梯阻抗传输线的高灵敏度反射模式缺陷探测器和介电常数传感器。

Highly Sensitive Reflective-Mode Defect Detectors and Dielectric Constant Sensors Based on Open-Ended Stepped-Impedance Transmission Lines.

作者信息

Casacuberta Pau, Muñoz-Enano Jonathan, Vélez Paris, Su Lijuan, Gil Marta, Martín Ferran

机构信息

CIMITEC, Departament d'Enginyeria Electrònica, Universitat Autònoma de Barcelona, Bellaterra, 08193 Barcelona, Spain.

Departamento Ingeniería Audiovisual y Comunicaciones, Universidad Politécnica de Madrid, 28031 Madrid, Spain.

出版信息

Sensors (Basel). 2020 Oct 31;20(21):6236. doi: 10.3390/s20216236.

DOI:10.3390/s20216236
PMID:33142909
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7663740/
Abstract

In this paper, reflective-mode phase-variation sensors based on open-ended stepped-impedance transmission lines with optimized sensitivity for their use as defect detectors and dielectric constant sensors are reported. The sensitive part of the sensors consists of either a 90° high-impedance or a 180° low-impedance open-ended sensing line. To optimize the sensitivity, such a sensing line is cascaded to a 90° transmission line section with either low or high characteristic impedance, resulting in a stepped-impedance transmission line configuration. For validation purposes, two different sensors are designed and fabricated. One of the sensors is implemented by means of a 90° high impedance (85 Ω) open-ended sensing line cascaded to a 90° low impedance (15 Ω) transmission line section. The other sensor consists of a 180° 15-Ω open-ended sensing line cascaded to a 90° 85-Ω line. Sensitivity optimization for the measurement of dielectric constants in the vicinity of that corresponding to the substrate (i.e., with dielectric constant 3.55) is carried out. The functionality as a defect detector is demonstrated by measuring the phase-variation in samples consisting of the uncoated substrate (the reference sample) with arrays of holes of different densities.

摘要

本文报道了基于开放式阶梯阻抗传输线的反射模式相位变化传感器，其具有优化的灵敏度，可用作缺陷探测器和介电常数传感器。传感器的敏感部分由90°高阻抗或180°低阻抗开放式传感线组成。为了优化灵敏度，将这样的传感线与具有低或高特性阻抗的90°传输线部分级联，从而形成阶梯阻抗传输线配置。为了进行验证，设计并制造了两种不同的传感器。其中一种传感器通过将90°高阻抗（85Ω）开放式传感线与90°低阻抗（15Ω）传输线部分级联来实现。另一种传感器由180°15Ω开放式传感线与90°85Ω线级联组成。针对在与基板相对应的介电常数（即介电常数为3.55）附近测量介电常数进行了灵敏度优化。通过测量由具有不同密度孔阵列的未涂覆基板（参考样品）组成的样品中的相位变化，展示了作为缺陷探测器的功能。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/966cba2bfd96/sensors-20-06236-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/e06e5743b07c/sensors-20-06236-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/c2413cbe2b17/sensors-20-06236-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/04c7c7fadc29/sensors-20-06236-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/50248300a9e3/sensors-20-06236-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/1aeea14f2ba9/sensors-20-06236-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/5d7d6ae1d21e/sensors-20-06236-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/6b1c657df8bb/sensors-20-06236-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/966cba2bfd96/sensors-20-06236-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/e06e5743b07c/sensors-20-06236-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/c2413cbe2b17/sensors-20-06236-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/04c7c7fadc29/sensors-20-06236-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/50248300a9e3/sensors-20-06236-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/1aeea14f2ba9/sensors-20-06236-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/5d7d6ae1d21e/sensors-20-06236-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/6b1c657df8bb/sensors-20-06236-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/af8f/7663740/966cba2bfd96/sensors-20-06236-g008.jpg

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