Liu Xianchao, Zhou Hongxi, Yang Ming, Xie Zheyuan, Han Qi, Gou Jun, Wang Jun
Opt Express. 2020 Nov 9;28(23):33959-33970. doi: 10.1364/OE.406127.
Engineered spherical micro-lens can manipulate light at sub-wavelength scale and emerges as a promising candidate to extend the focal length and narrow the focal spot size. Here, we report the generation of photonic nanojets (PNJs) with an ultralong working distance and narrowed beam waist by an immersed engineered hemisphere. Simulations show that a two-layer hemisphere of 4.5 µm radius exhibits a PNJ with the working distance of 9.6 µm, full width at half maximum of 287 nm, and length of 23.37 λ, under illumination of a plane wave with a 365 nm wavelength. A geometrical optics analysis indicated that the formed PNJ behind the immersed two-layer hemisphere results from the convergence of light of the outer-hemisphere fringe area, which refracts into and passes through the outer hemisphere and then directly leaves the outer-hemisphere flat surface. Thus the embedded hemisphere is comparable to an immersed focusing lens with high numerical aperture, which can promise both long working distance and narrowed beam waist. This is further demonstrated with the corresponding embedded-engineered single-layer hemisphere, whose spherical face is partly cut parallel to the hemispherical flat surface. In addition, the hemisphere is compatible with adjacent laser wavelengths. Finally, a spot size smaller than 0.5 λ is demonstrated in the lithography simulation. Due to these hemispheres low cost, they have potential in far-field lithography for pattern arrays with line width less than 0.5 λ.
工程化球形微透镜能够在亚波长尺度上操控光,成为延长焦距和缩小焦斑尺寸的一个有前景的候选方案。在此,我们报道了通过浸没式工程化半球体产生具有超长工作距离和变窄束腰的光子纳米喷流(PNJ)。模拟表明,在波长为365 nm的平面波照射下,半径为4.5 µm的双层半球体展现出一个工作距离为9.6 µm、半高宽为287 nm且长度为23.37λ的PNJ。几何光学分析表明,浸没式双层半球体后方形成的PNJ是由外半球边缘区域的光汇聚而成,这些光折射进入并穿过外半球,然后直接离开外半球平面。因此,嵌入式半球体相当于一个具有高数值孔径的浸没式聚焦透镜,能够保证长工作距离和变窄束腰。这通过相应的嵌入式工程化单层半球体得到了进一步证明,其球面部分平行于半球平面切割。此外该半球体与相邻激光波长兼容。最后,在光刻模拟中展示了小于0.5λ的光斑尺寸。由于这些半球体成本低,它们在远场光刻用于线宽小于0.5λ的图案阵列方面具有潜力。