Photoluminescence of diamond containing nitrogen vacancy defects as a sensor of temperature upon exposure to vacuum- and extreme-ultraviolet radiation.

Upon excitation with vacuum-ultraviolet (VUV) and extreme-ultraviolet (EUV) radiation, diamond with nitrogen vacancies (DNV) emits strong photoluminescence (PL) in the wavelength region of 550-800 nm. The spectral profiles of the DNV in the PL spectra appear to be strongly dependent on the temperature of the diamond. Moreover, all PL spectra intersect at one isosbestic point, 570 nm; this result is evidence that the NV0 and NV- defects in diamond interconvert with each other upon VUV and EUV radiation. We suggest the use of PL spectra of DNV excited with VUV or EUV light to indicate the temperature for applications such as in nano-photolithography technology for the manufacture of semiconductor devices.