Din Hussamud, Iqbal Faisal, Lee Byeungleul
School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan 31253, Korea.
Micromachines (Basel). 2020 Nov 24;11(12):1030. doi: 10.3390/mi11121030.
In this paper, a COMSOL Multiphysics-based methodology is presented for evaluation of the microelectromechanical systems (MEMS) gyroscope. The established finite element analysis (FEA) model was successfully validated through a comparison with analytical and Matlab/Simulink analysis results. A simplified single-drive, 3-axis MEMS gyroscope was analyzed using a mode split approach, having a drive resonant frequency of 24,918 Hz, with the x-sense, y-sense, and z-sense being 25,625, 25,886, and 25,806 Hz, respectively. Drive-mode analysis was carried out and a maximum drive-displacement of 4.0 μm was computed for a 0.378 μN harmonic drive force. Mechanical sensitivity was computed at 2000 degrees per second (dps) input angular rate while the scale factor for roll, pitch, and yaw was computed to be 0.014, 0.011, and 0.013 nm/dps, respectively.
本文提出了一种基于COMSOL Multiphysics的微机电系统（MEMS）陀螺仪评估方法。通过与解析分析和Matlab/Simulink分析结果进行比较，成功验证了所建立的有限元分析（FEA）模型。采用模式分裂方法对简化的单驱动三轴MEMS陀螺仪进行了分析，其驱动共振频率为24918 Hz，x向敏感轴、y向敏感轴和z向敏感轴的频率分别为25625 Hz、25886 Hz和25806 Hz。进行了驱动模式分析，对于0.378 μN的谐波驱动力，计算出最大驱动位移为4.0 μm。在输入角速率为2000度每秒（dps）时计算了机械灵敏度，同时计算出滚转、俯仰和偏航的比例因子分别为0.014 nm/dps、0.011 nm/dps和0.013 nm/dps。
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