用于激光材料加工的材料的成像散射测量法及缺失双向反射分布函数数据的外推法

Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing.

作者信息

Zakrzewski Adrian, Jurewicz Piotr, Ćwikła Michał, Koruba Piotr, Reiner Jacek

机构信息

Faculty of Mechanical Engineering, Wrocław University of Science and Technology, Wybrzeże Stanisława Wyspiańskiego 27, 50-370 Wrocław, Poland.

出版信息

Sensors (Basel). 2020 Dec 22;21(1):8. doi: 10.3390/s21010008.

DOI:10.3390/s21010008

PMID:33374993

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7792605/

Abstract

Imaging scatterometry is a method for determining the reflection distribution based on bidirectional reflectance distribution function (BRDF) measurements. However, it has a well-known limitation that results obtained by imaging scatterometry for small illumination angles are practically useless. Therefore, we propose an approach for reconstruction of the reflection distribution based on a series of measurements at different illumination angles and extrapolation of the missing results to overcome this limitation. The developed algorithm was validated using bidirectional transmittance distribution function (BTDF) measurements. The BRDF measurements were carried out for materials that are commonly used in laser material processing, i.e. substrates and functional coatings. The obtained data were subsequently used to determine the total reflection intensity from all considered materials, which were characterized by reconstructed distributions.

摘要

成像散射测量法是一种基于双向反射分布函数（BRDF）测量来确定反射分布的方法。然而，它有一个众所周知的局限性，即对于小照明角度通过成像散射测量法获得的结果实际上毫无用处。因此，我们提出一种基于在不同照明角度下的一系列测量以及对缺失结果进行外推来重建反射分布的方法，以克服这一局限性。所开发的算法通过双向透过率分布函数（BTDF）测量进行了验证。对激光材料加工中常用的材料，即基底和功能涂层，进行了BRDF测量。随后，将获得的数据用于确定所有考虑材料的总反射强度，这些材料以重建分布为特征。