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一种用于侵蚀和热脱附光谱测量的高温双模石英晶体微天平技术。

A high temperature dual-mode quartz crystal microbalance technique for erosion and thermal desorption spectroscopy measurements.

作者信息

Stadlmayr Reinhard, Szabo Paul Stefan, Biber Herbert, Koslowski Hans Rudolf, Kadletz Elisabeth, Cupak Christian, Wilhelm Richard Arthur, Schmid Michael, Linsmeier Christian, Aumayr Friedrich

机构信息

TU Wien, Institute of Applied Physics, Fusion@ÖAW, 1040 Vienna, Austria.

Forschungszentrum Jülich GmbH, Institut für Energie- und Klimaforschung - Plasmaphysik, 52425 Jülich, Germany.

出版信息

Rev Sci Instrum. 2020 Dec 1;91(12):125104. doi: 10.1063/5.0012028.

DOI:10.1063/5.0012028
PMID:33379941
Abstract

An improved quartz crystal microbalance measurement method is described, which allows us to determine erosion, implantation, and release rates of thin films, during changing temperatures and up to 700 K. A quasi-simultaneous excitation of two eigenmodes of the quartz resonator is able to compensate for frequency drifts due to temperature changes. The necessary electronics, the controlling behavior, and the dual-mode temperature compensation are described. With this improved technique, quantitative in situ temperature-programmed desorption measurements are possible and the quartz crystal microbalance can be used for quantification of thermal desorption spectroscopy measurements with a quadrupole mass spectrometer. This is demonstrated by a study of the retention and release behavior of hydrogen isotopes in fusion-relevant materials. We find that more than 90% of the deuterium implanted into a thin film of beryllium is released during a subsequent temperature ramp up to 500 K.

摘要

本文描述了一种改进的石英晶体微天平测量方法,该方法使我们能够在温度变化至700K的过程中测定薄膜的侵蚀、注入和释放速率。对石英谐振器的两个本征模式进行准同时激发能够补偿由于温度变化引起的频率漂移。文中描述了所需的电子设备、控制行为以及双模温度补偿。采用这种改进技术,可以进行定量原位程序升温脱附测量,并且石英晶体微天平可用于与四极质谱仪联用的热脱附光谱测量的定量分析。通过对聚变相关材料中氢同位素的保留和释放行为的研究证明了这一点。我们发现,注入到铍薄膜中的氘在随后升温至500K的过程中,有超过90%会释放出来。

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