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用于气体传感应用的氧化铟锡评估:粉末和厚膜的吸附/解吸及电导率研究

Evaluation of Indium Tin Oxide for Gas Sensing Applications: Adsorption/Desorption and Electrical Conductivity Studies on Powders and Thick Films.

作者信息

Dietrich Stefan, Kusnezoff Mihails, Petasch Uwe, Michaelis Alexander

机构信息

Fraunhofer Institute for Ceramic Technologies and Systems IKTS, Winterbergstr. 28, 01277 Dresden, Germany.

Institute of Materials Science, Technische Universität Dresden, 01069 Dresden, Germany.

出版信息

Sensors (Basel). 2021 Jan 12;21(2):497. doi: 10.3390/s21020497.

Abstract

By combining results of adsorption/desorption measurements on powders and electrical conductivity studies on thick and thin films, the interaction of indium tin oxide with various ambient gas species and carbon monoxide as potential target gas was studied between room temperature and 700 °C. The results show that the indium tin oxide surfaces exhibit a significant coverage of water-related and carbonaceous adsorbates even at temperatures as high as 600 °C. Specifically carbonaceous species, which are also produced under carbon monoxide exposure, show a detrimental effect on oxygen adsorption and may impair the film's sensitivity to a variety of target gases if the material is used in gas sensing applications. Consequently, the operating temperature of an ITO based chemoresistive carbon monoxide sensor should be selected within a range where the decomposition and desorption of these species proceeds rapidly, while the surface oxygen coverage is still high enough to provide ample species for target gas interaction.

摘要

通过结合粉末的吸附/解吸测量结果以及厚膜和薄膜的电导率研究,在室温至700°C之间研究了氧化铟锡与各种环境气体物种以及作为潜在目标气体的一氧化碳之间的相互作用。结果表明,即使在高达600°C的温度下,氧化铟锡表面也存在大量与水相关的和含碳吸附物。特别是在一氧化碳暴露下也会产生的含碳物种,对氧吸附有不利影响,如果该材料用于气体传感应用,可能会损害薄膜对各种目标气体的灵敏度。因此,基于氧化铟锡的化学电阻式一氧化碳传感器的工作温度应选择在这些物种的分解和解吸迅速进行的范围内,同时表面氧覆盖率仍足够高,以提供足够的物种用于与目标气体相互作用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9e2c/7827662/6ef5adde25d1/sensors-21-00497-g001.jpg

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