Chen Lih-Ren, Hong Kuo-Bin, Chen Hsiu-Ling, Huang Kuan-Chih, Lu Tien-Chang
Department of Photonics, College of Electrical and Computer Engineering, National Chiao Tung University, Hsinchu City, 30010, Taiwan.
Sci Rep. 2021 Jan 28;11(1):2427. doi: 10.1038/s41598-021-82194-4.
We designed and fabricated a photonic crystal surface emitting laser (PCSEL) with vertically integrated diffractive optical elements on their top to study the mechanism of static beam steering on a single chip. The deflected output beam by the self-formed periodic ITO cladding layer of the PCSEL can be further steered by changing the grating period and azimuthal angle of the diffractive gratings relative to the photonic crystal. Through the analysis of photonic band structure and lasing characteristics, the periodic ITO structure is coupled to the photonic crystal band, whereas the integrated grating serves the diffractive function only. The findings pave the way for the design of PCSELs enabling single or multiple output beam with varying direction capability. This type of laser is regarded as an ideal light source for various applications, such as light detection and ranging and three-dimensional sensing systems.
我们设计并制造了一种光子晶体表面发射激光器（PCSEL），其顶部垂直集成了衍射光学元件，以研究单芯片上静态光束转向的机制。通过改变衍射光栅相对于光子晶体的光栅周期和方位角，PCSEL自形成的周期性ITO包层所偏转的输出光束可以进一步转向。通过对光子带结构和激光特性的分析，周期性ITO结构与光子晶体带耦合，而集成光栅仅起衍射作用。这些发现为设计具有可变方向能力的单输出或多输出光束的PCSEL铺平了道路。这种类型的激光器被认为是各种应用的理想光源，如光探测和测距以及三维传感系统。
