Li Xiao-Xi, Chen Xin-Yu, Chen Jin-Xin, Zeng Guang, Li Yu-Chun, Huang Wei, Ji Zhi-Gang, Zhang David Wei, Lu Hong-Liang
State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, People's Republic of China.
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiaotong University, Shanghai, 200240, People's Republic of China.
Nanotechnology. 2021 Mar 4;32(21). doi: 10.1088/1361-6528/abe2cc.
An asymmetric dual-gate (DG) MoSfield-effect transistor (FET) with ultrahigh electrical performance and optical responsivity using atomic-layer-deposited HfOas a top-gate (TG) dielectric was fabricated and investigated. The effective DG modulation of the MoSFET exhibited an outstanding electrical performance with a high on/off current ratio of 6 × 10. Furthermore, a large threshold voltage modulation could be obtained from -20.5 to -39.3 V as a function of the TG voltage in a DG MoSphototransistor. Meanwhile, the optical properties were systematically explored under a series of gate biases and illuminated optical power under 550 nm laser illumination. An ultrahigh photoresponsivity of 2.04 × 10AWhas been demonstrated with the structure of a DG MoSphototransistor because the electric field formed by the DG can separate photogenerated electrons and holes efficiently. Thus, the DG design for 2D materials with ultrahigh photoresponsivity provides a promising opportunity for the application of optoelectronic devices.
制备并研究了一种具有超高电学性能和光学响应度的非对称双栅(DG)钼基场效应晶体管(FET),其使用原子层沉积的HfO作为顶栅(TG)电介质。MoSFET的有效双栅调制表现出出色的电学性能,开/关电流比高达6×10。此外,在DG MoS光电晶体管中,作为TG电压的函数,可以获得从-20.5到-39.3 V的大阈值电压调制。同时,在一系列栅极偏置和550 nm激光照射下的光照功率下,系统地探索了光学性质。由于DG形成的电场可以有效地分离光生电子和空穴,DG MoS光电晶体管结构已证明具有2.04×10 A/W的超高光响应度。因此,具有超高光响应度的二维材料的双栅设计为光电器件的应用提供了一个有前景的机会。