Shi Ling-Ying, Lee Sangho, Du Qingyang, Zhou Bo, Weng Lin, Liu Runze, Ross Caroline A
College of Polymer Science and Engineering, Sichuan University, Chengdu 610065, China.
Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, United States.
ACS Appl Mater Interfaces. 2021 Mar 3;13(8):10437-10445. doi: 10.1021/acsami.0c22177. Epub 2021 Feb 19.
The formation of zigzags, chevrons, Y-junctions, and line segments is demonstrated in thin films formed from cylindrical morphology silicon-containing conformationally asymmetric rod-coil diblock copolymers and triblock terpolymers under solvent annealing. Directed self-assembly of the block copolymers within trenches yields well-ordered cylindrical microdomains oriented either parallel or transverse to the sidewalls depending on the chemical functionalization of the sidewalls, and the location and structure of concentric bends in the cylinders is determined by the shape of the trenches. The innate etching contrast, the spontaneous sharp bends and junctions, and the range of demonstrated periodicity and line/space ratios make these conformationally asymmetric rod-coil polymers attractive for nanoscale pattern generation.
在溶剂退火条件下，由具有圆柱形形态的含硅构象不对称棒-线圈二嵌段共聚物和三嵌段三元共聚物形成的薄膜中，展示出了锯齿形、人字形、Y形结和线段的形成。沟槽内的嵌段共聚物的定向自组装产生了排列有序的圆柱形微区，这些微区根据侧壁的化学功能化而平行或垂直于侧壁定向，并且圆柱体中同心弯曲的位置和结构由沟槽的形状决定。固有的蚀刻对比度、自发的尖锐弯曲和结，以及所展示的周期性范围和线/间距比，使得这些构象不对称的棒-线圈聚合物对于纳米级图案生成具有吸引力。
