Skopinski L, Ernst P, Herder M, Kozubek R, Madauß L, Sleziona S, Maas A, Königstein N, Lebius H, Wucher A, Schleberger M
Fakultät für Physik and CENIDE, Universität Duisburg-Essen, 47057 Duisburg, Germany.
Normandie Univ., ENSICAEN, UNICAEN, CEA, CNRS, CIMAP, 14000 Caen, France.
Rev Sci Instrum. 2021 Feb 1;92(2):023909. doi: 10.1063/5.0025812.
We describe a setup for the analysis of secondary ions and neutrals emitted from solid surfaces and two-dimensional materials during irradiation with highly charged ions. The ultrahigh vacuum setup consists of an electron beam ion source to produce bunches of ions with various charge states q (e.g., Xe-Xe) and thus potential energies, a deceleration/acceleration section to tune the kinetic energy of the ions in the range of 5 keV to 20 × q keV, a sample stage for laser-cleaning and positioning of freestanding as well as supported samples, a pulsed excimer laser for post-ionization of sputtered neutrals, and a reflectron type time-of-flight mass spectrometer, enabling us to analyze mass and velocity distributions of the emitted particles. With our setup, contributions from potential and kinetic energy deposition can be studied independently of each other. Charge dependent experiments conducted at a constant kinetic energy show a clear threshold for the emission of secondary ions from SrTiO. Data taken with the same projectile charge state, but at a different kinetic energy, reveal a difference in the ratio of emitted particles from MoS. In addition, first results are presented, demonstrating how velocity distributions can be measured with the new setup.
我们描述了一种用于分析在高电荷离子辐照期间从固体表面和二维材料发射的二次离子和中性粒子的装置。该超高真空装置包括一个电子束离子源，用于产生具有各种电荷态q（例如Xe-Xe）从而具有不同势能的离子束；一个减速/加速区，用于将离子的动能调节到5 keV至20×q keV范围内；一个样品台，用于对独立的以及支撑的样品进行激光清洁和定位；一台脉冲准分子激光器，用于对溅射中性粒子进行后电离；以及一台反射式飞行时间质谱仪，使我们能够分析发射粒子的质量和速度分布。通过我们的装置，可以相互独立地研究势能和动能沉积的贡献。在恒定动能下进行的电荷相关实验表明，从SrTiO发射二次离子存在明显的阈值。在相同的弹丸电荷态但不同动能下获取的数据显示，MoS发射粒子的比例存在差异。此外，还展示了初步结果，说明了如何使用新装置测量速度分布。
