Szwagierczak Dorota, Synkiewicz-Musialska Beata, Kulawik Jan, Pałka Norbert
Łukasiewicz Research Network-Institute of Microelectronics and Photonics, Kraków Division, ul. Zabłocie 39, 30-701 Kraków, Poland.
Institute of Optoelectronics, Military University of Technology, ul. gen. W. Urbanowicza 2, 00-908 Warszawa, Poland.
Materials (Basel). 2021 Feb 21;14(4):1014. doi: 10.3390/ma14041014.
New zinc metaborate ZnBO-willemite ZnSiO composites were investigated as promising materials for LTCC (low temperature cofired ceramics) substrates of microelectronic circuits for submillimeter wave applications. Composites were prepared as bulk ceramics and LTCC multilayer structures with cofired conductive thick films. The phase composition, crystal structure, microstructure, sintering behavior, and dielectric properties were studied as a function of willemite content (0, 10, 13, 15, 20, 40, 50, 60, 100 wt %). The dielectric properties characterization performed by THz time domain spectroscopy proved the applicability of the composites at very high frequencies. For the 87% ZnBO-13% ZnSiO composite, the best characteristics were obtained, which are suitable for LTCC submillimeter wave applications. These were a low sintering temperature of 930 °C, compatibility with Ag-based conductors, a low dielectric constant (5.8 at 0.15-1.1 THz), a low dissipation factor (0.006 at 1 THz), and weak frequency and temperature dependences of dielectric constant.
新型硼酸锌锌硼硅复合材料被研究作为用于亚毫米波应用的微电子电路低温共烧陶瓷（LTCC）基板的有前景的材料。复合材料被制备成块状陶瓷以及带有共烧导电厚膜的LTCC多层结构。研究了相组成、晶体结构、微观结构、烧结行为和介电性能作为硅锌矿含量（0、10、13、15、20、40、50、60、100重量%）的函数。通过太赫兹时域光谱进行的介电性能表征证明了该复合材料在非常高频率下的适用性。对于87%硼酸锌-13%硅锌矿复合材料，获得了最佳特性，适用于LTCC亚毫米波应用。这些特性包括930℃的低烧结温度、与银基导体的兼容性、低介电常数（在0.15 - 1.1太赫兹时为5.8）、低损耗因数（在1太赫兹时为0.006）以及介电常数对频率和温度的弱依赖性。
