用于3D光子集成电路的基于亚波长光栅的模式（解）复用器。
Subwavelength grating based mode (de)multiplexer for 3D photonic integrated circuits.
作者信息
Jiang Weifeng, Hu Jinzhu, Mao Siqiang, Feng Jiaqi, Hao Xiaoyu, Zhang Yingjia
出版信息
Appl Opt. 2021 Feb 10;60(5):1164-1170. doi: 10.1364/AO.416116.
A broadband three-dimensional (3D) mode (de) multiplexer [(De)MUX] is proposed based on the subwavelength grating (SWG) for 3D photonic integrated circuits (PICs). The proposed 3D mode (De)MUX consists of three SWG waveguides on two vertical layers. The coupling strength and operating bandwidth can be increased benefitting from both the subwavelength structure and offset between bus and access SWGs. The proposed 3D mode (De)MUX is optimized based on the 3D full-vectorial finite difference time domain method. The 1-dB bandwidths of the optimized device are over >300, 107, and 128 nm for demultiplexing , , and modes, respectively. The coupling lengths are only 5.0 and 1.75 µm for demultiplexing the and modes, respectively. The insertion losses are 0.12, 0.27, and 0.29 dB, respectively. The proposed 3D mode (De)MUX is also fabrication tolerant.
基于亚波长光栅（SWG），为三维光子集成电路（PIC）提出了一种宽带三维（3D）模式复用/解复用器（复用/解复用器）。所提出的3D模式复用/解复用器由两个垂直层上的三个SWG波导组成。受益于亚波长结构以及总线与接入SWG之间的偏移，耦合强度和工作带宽得以增加。所提出的3D模式复用/解复用器基于三维全矢量有限差分时域方法进行了优化。对于解复用 、 和 模式，优化后的器件的1 dB带宽分别超过300、107和128 nm。对于解复用 和 模式，耦合长度分别仅为5.0和1.75 µm。插入损耗分别为0.12、0.27和0.29 dB。所提出的3D模式复用/解复用器也具有工艺宽容性。
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