Xu Yuanyuan, Liang Yu, Zou Yang, Shen Qibao, Xue Shuangshuang, Wang Yawei, Zhu Shining
Appl Opt. 2021 Feb 10;60(5):1440-1447. doi: 10.1364/AO.402801.
Phase imaging is an important measurement method in optical metrology, and phase extraction is one of its essential components. A method using one-frame dual-wavelength interferometry (DWI) for fast phase extraction is proposed. Using this method, the Hilbert transform (HT) is applied twice to a wavelength-multiplexed interferogram to obtain two images. The HT is then applied twice to the sum of the squares of these two images. The synthetic wavelength phase can then be obtained. Compared with other common multiple-frame DWI methods, the proposed approach requires only one multiplexed interferogram and does not have to consider parameter changes in interferograms of different frames. Furthermore, the proposed method was determined to require the least calculation time, and the simulation and experimental results confirmed its high accuracy and efficiency. It suggests that the proposed method is suitable for real-time measurements.
相位成像在光学计量中是一种重要的测量方法，而相位提取是其重要组成部分之一。提出了一种使用单帧双波长干涉测量法（DWI）进行快速相位提取的方法。利用该方法，将希尔伯特变换（HT）应用于波长复用干涉图两次以获得两幅图像。然后将HT应用于这两幅图像平方和的两次。进而可获得合成波长相位。与其他常见的多帧DWI方法相比，该方法仅需一幅复用干涉图，且无需考虑不同帧干涉图中的参数变化。此外，该方法被确定为计算时间最少，模拟和实验结果证实了其高精度和高效率。这表明该方法适用于实时测量。
