Lee Sang Ho, Cho Min Su, Jung Jun Hyeok, Jang Won Douk, Mun Hye Jin, Jang Jaewon, Bae Jin-Hyuk, Kang In Man
School of Electronic and Electrical Engineering, Kyungpook National University, Daegu, 702-701, Republic of Korea.
J Nanosci Nanotechnol. 2021 Aug 1;21(8):4223-4229. doi: 10.1166/jnn.2021.19386.
In this paper, a 1T-DRAM based on the junctionless field-effect transistor (JLFET) with an ultrathin polycrystalline silicon layer was designed and investigated by using technology computer-aided design simulation (TCAD). The application of a negative voltage at the control gate results in the generation of holes in the storage region by the band-to-band tunneling (BTBT) effect. Memory characteristics such as sensing margin and retention time are affected by the doping concentration of the storage region, bias condition of the program, and length of the intrinsic region. In addition, the gate acts as a switch that controls the transfer characteristics while the control gate plays a role in retaining holes in the hold state. The device was optimized, considering various parameters such as the doping concentration of the storage region (), intrinsic region length (), and operation bias conditions to obtain a high sensing margin of 49.7 A/m and a long retention time of 2 s even at a high temperature of 358 K. The obtained retention time is almost 30 times longer than that predicted for modern DRAM cells by the International technology roadmap for semiconductors (ITRS).
本文采用技术计算机辅助设计模拟(TCAD)设计并研究了一种基于具有超薄多晶硅层的无结场效应晶体管(JLFET)的1T-DRAM。在控制栅极施加负电压会通过带间隧穿(BTBT)效应在存储区域产生空穴。诸如传感裕度和保持时间等存储特性受存储区域的掺杂浓度、编程偏置条件以及本征区域长度的影响。此外,栅极充当控制传输特性的开关,而控制栅极在保持状态下起到保留空穴的作用。考虑到存储区域的掺杂浓度()、本征区域长度()和操作偏置条件等各种参数对器件进行了优化,即使在358 K的高温下也能获得49.7 A/m的高传感裕度和2 s的长保持时间。所获得的保持时间几乎比国际半导体技术路线图(ITRS)预测的现代DRAM单元的保持时间长30倍。