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通过光刻技术在光纤表面引入的微谐振器器件。

Microresonator devices lithographically introduced at the optical fiber surface.

作者信息

Toropov N, Zaki S, Vartanyan T, Sumetsky M

出版信息

Opt Lett. 2021 Apr 1;46(7):1784-1787. doi: 10.1364/OL.421104.

Abstract

We present a simple lithographic method for fabrication of microresonator devices at the optical fiber surface. First, we undress the predetermined surface areas of a fiber segment from the polymer coating with a focused laser beam. Next, using the remaining coating as a mask, we etch the fiber in a hydrofluoric acid solution. Finally, we completely undress the fiber segment from coating to create a chain of silica bottle microresonators with nanoscale radius variation [surface nanoscale axial photonics (SNAP) microresonators]. We demonstrate the developed method by fabrication of a chain of five 1 mm long and 30 nm high microresonators at the surface of a 125 µm diameter optical fiber and a single 0.5 mm long and 291 nm high microresonator at the surface of a 38 µm diameter fiber. As another application, we fabricate a rectangular 5 mm long SNAP microresonator at the surface of a 38 µm diameter fiber and investigate its performance as a miniature delay line. The propagation of a 100 ps pulse with 1 ns delay, 0.035c velocity, and negligible dispersion is demonstrated. In contrast to previously developed approaches in SNAP technology, the developed method allows the introduction of much larger fiber radius variation ranging from nanoscale to microscale.

摘要

我们提出了一种用于在光纤表面制造微谐振器器件的简单光刻方法。首先,我们用聚焦激光束去除光纤段预定表面区域的聚合物涂层。接下来,以剩余的涂层为掩膜,在氢氟酸溶液中蚀刻光纤。最后,我们完全去除光纤段的涂层,以创建一系列具有纳米级半径变化的二氧化硅瓶形微谐振器[表面纳米级轴向光子学(SNAP)微谐振器]。我们通过在直径为125 µm的光纤表面制造一串五个1 mm长、30 nm高的微谐振器,以及在直径为38 µm的光纤表面制造一个0.5 mm长、291 nm高的单个微谐振器,展示了所开发的方法。作为另一个应用,我们在直径为38 µm的光纤表面制造了一个5 mm长的矩形SNAP微谐振器,并研究了其作为微型延迟线的性能。展示了一个100 ps脉冲以1 ns延迟、0.035c速度传播且色散可忽略不计的情况。与SNAP技术中先前开发的方法相比,所开发的方法允许引入从纳米级到微米级的更大光纤半径变化。

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