Department of Theoretical Physics, State University of Moldova, MD 2009 Chisinau, Moldova.
Department of Surface and Plasma Science, Charles University, CZ-18000 Prague, Czech Republic.
Sensors (Basel). 2021 Mar 8;21(5):1886. doi: 10.3390/s21051886.
We considered the effect of coverage of the surface of InO films with rhodium on the sensitivity of their electrophysical properties to ozone (1 ppm). The surface coverage with rhodium varied in the range of 0-0.1 ML. The InO films deposited by spray pyrolysis had a thickness of 40-50 nm. The sensor response to ozone depends on the degree of rhodium coverage. This dependence has a pronounced maximum at a coverage of ~0.01 ML of Rh. An explanation is given for this effect. It is concluded that the observed changes are associated with the transition from the atomically dispersed state of rhodium to a 3D cluster state.
我们研究了铑覆盖氧化铟（InO）薄膜表面对其电物理性质对臭氧（1ppm）敏感性的影响。铑的表面覆盖度在 0-0.1 ML 范围内变化。通过喷雾热解法沉积的 InO 薄膜厚度为 40-50nm。传感器对臭氧的响应取决于铑覆盖度。在铑覆盖率约为 0.01 ML 时，这种依赖性表现出明显的最大值。对这种效应给出了一种解释。结论是，观察到的变化与铑从原子分散状态向 3D 团簇状态的转变有关。
