基于甘油液滴体积膨胀的高灵敏度声回廊模式湿度传感器。

High-Sensitivity Whispering Gallery Mode Humidity Sensor Based on Glycerol Microdroplet Volumetric Expansion.

机构信息

Quantum Optics Laboratory, Institute of Atomic Physics and Spectroscopy, University of Latvia, LV-1586 Riga, Latvia.

出版信息

Sensors (Basel). 2021 Mar 3;21(5):1746. doi: 10.3390/s21051746.

DOI:10.3390/s21051746

PMID:33802462

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7959475/

Abstract

We demonstrate a highly sensitive whispering gallery mode (WGM) relative humidity (RH) sensor based on a glycerol microdroplet. WGMs were excited using a 760 nm tunable semiconductor laser. We used free space coupling, which is effective when using a liquid resonator. A detailed analysis of different parameters influencing the sensor's characteristics (sensitivity, hysteresis, resolution, stability, and temperature) is presented. The sensitivity of the sensor is one of the highest reported (2.85 nm/% RH in the range 50-70% RH with the resolution 1 × 10% RH). This type of humidity sensor has several advantages, such as high sensitivity, extended lifetime, good repeatability, and low cost, as well as the use of a non-toxic and environmentally friendly liquid.

摘要

我们展示了一种基于甘油微滴的高灵敏度回音壁模式（WGM）相对湿度（RH）传感器。WGM 是使用 760nm 可调谐半导体激光激发的。我们使用了自由空间耦合，这在使用液体谐振器时非常有效。文中详细分析了影响传感器特性（灵敏度、滞后、分辨率、稳定性和温度）的不同参数。该传感器的灵敏度是报道的最高灵敏度之一（在 50-70%RH 范围内的灵敏度为 2.85nm/%RH，分辨率为 1×10%RH）。这种湿度传感器具有许多优点，例如高灵敏度、长寿命、良好的重复性和低成本，以及使用无毒和环保的液体。