Prajzler Vaclav, Chlupaty Vaclav, Kulha Pavel, Neruda Milos, Kopp Sonja, Mühlberger Michael
Department of Microelectronics, Faculty of Electrical Engineering, Czech Technical University in Prague, Technicka 2, 168 27 Prague, Czech Republic.
PROFACTOR GmbH, Im Stadtgut D1, A-4407 Steyr-Gleink, Austria.
Nanomaterials (Basel). 2021 Mar 13;11(3):724. doi: 10.3390/nano11030724.
The paper reports on the properties of UV-curable inorganic-organic hybrid polymer multimode optical channel waveguides fabricated by roll-to-plate (R2P) nanoimprinting. We measured transmission spectra, refractive indices of the applied polymer materials, and optimized the R2P fabrication process. Optical losses of the waveguides were measured by the cut-back method at wavelengths of 532, 650, 850, 1310, and 1550 nm. The lowest optical losses were measured at 850 nm and the lowest average value was 0.19 dB/cm, and optical losses at 1310 nm were 0.42 dB/cm and 0.25 dB/cm at 650 nm respectively. The study has demonstrated that nanoimprinting has great potential for the implementation of optical polymer waveguides not only for optical interconnection applications.
本文报道了通过卷对板(R2P)纳米压印制备的紫外光固化无机-有机杂化聚合物多模光通道波导的特性。我们测量了传输光谱、所用聚合物材料的折射率,并优化了R2P制备工艺。通过截断法在532、650、850、1310和1550 nm波长下测量了波导的光损耗。在850 nm处测得的最低光损耗,最低平均值为0.19 dB/cm,在1310 nm处的光损耗为0.42 dB/cm,在650 nm处为0.25 dB/cm。该研究表明,纳米压印不仅在光互连应用中,而且在光学聚合物波导的实现方面具有巨大潜力。