Kaulfuss Frank, Weihnacht Volker, Zawischa Martin, Lorenz Lars, Makowski Stefan, Hofmann Falko, Leson Andreas
Fraunhofer Institute for Material and Beam Technology (IWS), 01277 Dresden, Germany.
Institute of Manufacturing Science and Engineering, Technische Universität Dresden, 01069 Dresden, Germany.
Materials (Basel). 2021 Apr 23;14(9):2176. doi: 10.3390/ma14092176.
In this study, both the plasma process of filtered laser-arc evaporation and the resulting properties of tetrahedral amorphous carbon coatings are investigated. The energy distribution of the plasma species and the arc spot dynamics during the arc evaporation are described. Different ta-C coatings are synthesized by varying the bias pulse time and temperature during deposition. An increase in hardness was observed with the increased overlapping of the bias and arc pulse times. External heating resulted in a significant loss of hardness. A strong discrepancy between the in-plane properties and the properties in the film normal direction was detected specifically for a medium temperature of 120 °C during deposition. Investigations using electron microscopy revealed that this strong anisotropy can be explained by the formation of nanocrystalline graphite areas and their orientation toward the film's normal direction. This novel coating type differs from standard amorphous a-C and ta-C coatings and offers new possibilities for superior mechanical behavior due to its combination of a high hardness and low in-plane Young's Modulus.
在本研究中，对过滤激光电弧蒸发的等离子体过程以及由此产生的四面体非晶碳涂层的性能进行了研究。描述了电弧蒸发过程中等离子体物种的能量分布和电弧斑点动力学。通过在沉积过程中改变偏压脉冲时间和温度来合成不同的四面体非晶碳（ta-C）涂层。随着偏压和电弧脉冲时间重叠的增加，硬度有所提高。外部加热导致硬度显著损失。特别是在沉积过程中120°C的中等温度下，检测到面内性能与膜法线方向性能之间存在强烈差异。使用电子显微镜的研究表明，这种强烈的各向异性可以通过纳米晶石墨区域的形成及其朝向膜法线方向的取向来解释。这种新型涂层类型不同于标准的非晶态a-C和ta-C涂层，由于其高硬度和低面内杨氏模量的组合，为优异的机械性能提供了新的可能性。
