Yin DiFeng, Zhou Yuan, Liu Zhaoxiang, Wang Zhe, Zhang Haisu, Fang Zhiwei, Chu Wei, Wu Rongbo, Zhang Jianhao, Chen Wei, Wang Min, Cheng Ya
Opt Lett. 2021 May 1;46(9):2127-2130. doi: 10.1364/OL.424996.
We demonstrate monolithic integration of an electro-optically (EO) tunable microring laser on lithium niobate on insulator (LNOI) platform. The device is fabricated by photolithography assisted chemo-mechanical etching, and the pump laser is evanescently coupled into the erbium (${\rm{E}}{{\rm{r}}^{3 +}}$)-doped lithium niobate (LN) microring laser using an undoped LN waveguide mounted above the microring. The quality factor of the LN microring resonator is measured as high as ${1.54} \times {{1}}{{{0}}^5}$ at the wavelength of 1542 nm. Lasing action can be observed at a pump power threshold below 3.5 mW using a 980 nm continuous-wave pump laser. Finally, tuning of the laser wavelength is achieved by varying the electric voltage on the microelectrodes fabricated in the vicinity of a microring waveguide, showing an EO coefficient of 0.33 pm/V.
我们展示了一种在绝缘体上铌酸锂（LNOI）平台上的电光（EO）可调谐微环激光器的单片集成。该器件通过光刻辅助化学机械蚀刻制造，泵浦激光器通过安装在微环上方的未掺杂铌酸锂（LN）波导倏逝耦合到掺铒（${\rm{E}}{{\rm{r}}^{3 +}}$）的铌酸锂（LN）微环激光器中。在1542 nm波长处，LN微环谐振器的品质因数测得高达${1.54} \times {{1}}{{{0}}^5}$。使用980 nm连续波泵浦激光器，在低于3.5 mW的泵浦功率阈值下可以观察到激光发射。最后，通过改变微环波导附近制造的微电极上的电压来实现激光波长的调谐，显示出0.33 pm/V的电光系数。
