Hackett Lisa, Miller Michael, Brimigion Felicia, Dominguez Daniel, Peake Greg, Tauke-Pedretti Anna, Arterburn Shawn, Friedmann Thomas A, Eichenfield Matt
Microsystems Engineering, Science, and Applications, Sandia National Laboratories, Albuquerque, NM, USA.
Nat Commun. 2021 May 13;12(1):2769. doi: 10.1038/s41467-021-22935-1.
The addition of active, nonlinear, and nonreciprocal functionalities to passive piezoelectric acoustic wave technologies could enable all-acoustic and therefore ultra-compact radiofrequency signal processors. Toward this goal, we present a heterogeneously integrated acoustoelectric material platform consisting of a 50 nm indium gallium arsenide epitaxial semiconductor film in direct contact with a 41° YX lithium niobate piezoelectric substrate. We then demonstrate three of the main components of an all-acoustic radiofrequency signal processor: passive delay line filters, amplifiers, and circulators. Heterogeneous integration allows for simultaneous, independent optimization of the piezoelectric-acoustic and electronic properties, leading to the highest performing surface acoustic wave amplifiers ever developed in terms of gain per unit length and DC power dissipation, as well as the first-ever demonstrated acoustoelectric circulator with an isolation of 46 dB with a pulsed DC bias. Finally, we describe how the remaining components of an all-acoustic radiofrequency signal processor are an extension of this work.
在无源压电声波技术中添加有源、非线性和非互易功能，可实现全声学，从而实现超紧凑的射频信号处理器。为了实现这一目标，我们展示了一种异质集成的声电材料平台，该平台由与41°YX铌酸锂压电衬底直接接触的50纳米砷化铟镓外延半导体薄膜组成。然后，我们展示了全声学射频信号处理器的三个主要组件：无源延迟线滤波器、放大器和环行器。异质集成允许同时、独立地优化压电-声学和电子特性，从而开发出单位长度增益和直流功耗方面性能最高的表面声波放大器，以及首次展示的具有46分贝隔离度的脉冲直流偏置声电环行器。最后，我们描述了全声学射频信号处理器的其余组件如何是这项工作的延伸。
