High-Precision Machining Method of Weak-Stiffness Mirror Based on Fast Tool Servo Error Compensation Strategy.

Weak-stiffness mirrors are widely used in various fields such as aerospace and optoelectronic information. However, it is difficult to achieve micron-level precision machining because weak-stiffness mirrors are hard to clamp and are prone to deformation. The machining errors of these mirrors are randomly distributed and non-rotationally symmetric, which is difficult to overcome by common machining methods. Based on the fast tool servo system, this paper proposes a high-precision machining method for weak-stiffness mirrors. Firstly, the clamping error and cutting error compensation strategy is obtained by analyzing the changing process of the mirror surface morphology. Then, by combining real-time monitoring and theoretical simulation, the elastic deformation of the weak-stiffness mirror is accurately extracted to achieve the compensation of the clamping error, and the compensation of the cutting error is achieved by iterative machining. Finally, a weak-stiffness mirror with a thickness of 2.5 mm was machined twice, and the experimental process produced a clamping error with a peak to valley (PV) value of 5.2 µm and a cutting error with a PV value of 1.6 µm. The final machined surface after compensation had a PV value of 0.7 µm. The experimental results showed that the compensation strategy proposed in this paper overcomes the clamping error of the weak-stiffness mirror and significantly reduces cutting errors during the machining process, achieving the high precision machining of a weak-stiffness mirror.