Liu Jian, Chen Jinan, Zhang Yanran, Fu Shangjie, Chai Guozhi, Cao Cuimei, Zhu Xiaoyan, Guo Yongbin, Cheng Wenjuan, Jiang Dongmei, Zhao Zhenjie, Zhan Qingfeng
Key Laboratory of Polar Materials and Devices (MOE), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China.
Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Lanzhou University, Lanzhou 730000, China.
ACS Appl Mater Interfaces. 2021 Jun 30;13(25):29975-29983. doi: 10.1021/acsami.1c07384. Epub 2021 Jun 18.
We demonstrated a convenient method via applying uniaxial tensile strains to continuously tune the high-frequency properties of flexible magnetic films. CoFeB films were magnetron sputtered onto prestretched polydimethylsiloxane (PDMS) membranes. They exhibit a self-assembled periodic wrinkling surface structure because of the large mismatch of Young's moduli between the elastomeric PDMS substrates and the metal layers. The wrinkling morphology and the residual tensile stress caused by the Poisson effect can be continuously tuned by a uniaxial stretching strain less than the growth prestrain, which consequently results in changes in high-frequency performance. The initial permeability and the ferromagnetic resonance frequency of flexible CoFeB thin films can be monotonously tuned in wide ranges of about hundreds and 1 GHz, respectively. A good repeatability over thousands of stretching-relaxing cycles has been demonstrated without any obvious reduced high-frequency properties. This flexible CoFeB films with excellent stretching-tunable high-frequency performances are promising for application in flexible and tunable microwave devices.
我们展示了一种通过施加单轴拉伸应变来连续调节柔性磁性薄膜高频特性的便捷方法。将CoFeB薄膜磁控溅射在预拉伸的聚二甲基硅氧烷(PDMS)膜上。由于弹性体PDMS基底与金属层之间杨氏模量的巨大差异,它们呈现出自组装的周期性皱纹表面结构。由泊松效应引起的皱纹形态和残余拉伸应力可以通过小于生长预应变的单轴拉伸应变进行连续调节,这进而导致高频性能的变化。柔性CoFeB薄膜的初始磁导率和铁磁共振频率可分别在约数百和1 GHz的宽范围内单调调节。已经证明在数千次拉伸 - 松弛循环中具有良好的重复性,且高频性能没有任何明显降低。这种具有优异拉伸可调高频性能的柔性CoFeB薄膜在柔性和可调微波器件中具有应用前景。