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具有磁场角度和拉伸应变的可变形衬底上非晶Ta/CoFeB/MgO/Ta薄膜的磁性

Magnetic Properties of Amorphous Ta/CoFeB/MgO/Ta Thin Films on Deformable Substrates with Magnetic Field Angle and Tensile Strain.

作者信息

Jun Ah Hyun, Hwang Young Hyun, Kang Byeongwoo, Lee Seungwon, Seok Jiwon, Lee Jong Seong, Song Seo Hyun, Ju Byeong-Kwon

机构信息

Display and Nanosensor Laboratory, School of Electrical Engineering, Korea University, 145, Anam-ro, Seongbuk-gu, Seoul 02841, Republic of Korea.

出版信息

Sensors (Basel). 2023 Aug 28;23(17):7479. doi: 10.3390/s23177479.

DOI:10.3390/s23177479
PMID:37687934
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10490707/
Abstract

Recently, the application of cobalt iron boron (CoFeB) thin films in magnetic sensors has been widely studied owing to their high magnetic moment, anisotropy, and stability. However, most of these studies were conducted on rigid silicon substrates. For diverse applications of magnetic and angle sensors, it is important to explore the properties of ferromagnetic thin films grown on nonrigid deformable substrates. In this study, representative deformable substrates (polyimide (PI), polyethylene naphthalate (PEN), and polydimethylsiloxane (PDMS)), which can be bent or stretched, were used to assess the in-plane magnetic field angle-dependent properties of amorphous Ta/CoFeB/MgO/Ta thin films grown on deformable substrates. The effects of substrate roughness, tensile stress, deformable substrate characteristics, and sputtering on magnetic properties, such as the coercive field (), remanence over saturation magnetization (/), and biaxial characteristics, were investigated. This study presents an unconventional foundation for exploring deformable magnetic sensors capable of detecting magnetic field angles.

摘要

最近，钴铁硼（CoFeB）薄膜因其高磁矩、各向异性和稳定性，在磁传感器中的应用受到了广泛研究。然而，这些研究大多是在刚性硅基板上进行的。对于磁传感器和角度传感器的各种应用而言，探索在非刚性可变形基板上生长的铁磁薄膜的特性至关重要。在本研究中，使用了可弯曲或拉伸的代表性可变形基板（聚酰亚胺（PI）、聚萘二甲酸乙二醇酯（PEN）和聚二甲基硅氧烷（PDMS））来评估在可变形基板上生长的非晶Ta/CoFeB/MgO/Ta薄膜的面内磁场角度相关特性。研究了基板粗糙度、拉伸应力、可变形基板特性以及溅射对诸如矫顽场（）、剩余磁化强度与饱和磁化强度之比（/）和双轴特性等磁性能的影响。本研究为探索能够检测磁场角度的可变形磁传感器提供了一个非常规的基础。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/ee9ecba3db84/sensors-23-07479-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/f7731b007d18/sensors-23-07479-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/3c3a552f76b0/sensors-23-07479-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/e9088663c5c8/sensors-23-07479-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/68968ad856da/sensors-23-07479-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/c182f797e2c5/sensors-23-07479-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/f7b3881f657f/sensors-23-07479-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/80e68701e12e/sensors-23-07479-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/ee9ecba3db84/sensors-23-07479-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/f7731b007d18/sensors-23-07479-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/3c3a552f76b0/sensors-23-07479-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/e9088663c5c8/sensors-23-07479-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/68968ad856da/sensors-23-07479-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/c182f797e2c5/sensors-23-07479-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/f7b3881f657f/sensors-23-07479-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/80e68701e12e/sensors-23-07479-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f53b/10490707/ee9ecba3db84/sensors-23-07479-g008.jpg

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