Della Ciana M, Valt M, Fabbri B, Bernardoni P, Guidi V, Morandi V
Department of Physics and Earth Sciences, University of Ferrara, Via Giuseppe Saragat 1/c, 44122 Ferrara, Italy.
Institute of Microsystems and Microelectronics IMM-CNR, Via Gobetti 101, 40129 Bologna, Italy.
Rev Sci Instrum. 2021 Jul 1;92(7):074702. doi: 10.1063/5.0053635.
This work presents the design and validation of a measuring instrumentation for an easy, complete, and tunable characterization of chemiresistive gas sensors based on metal-oxide semiconductors. The equipment, described in depth both as hardware and as software, was designed to monitor the electrical behavior of gas sensors in controlled thermodynamic conditions. The main goal of this setup is to synchronize the electrical characterization with different measuring conditions, i.e., operating temperature, relative humidity, and gas target concentration. This operation allows us to automate various measurement protocols, otherwise impossible to obtain manually. In particular, this instrumentation permits to correlate the response of a chemiresistive gas sensor to the applied voltage, to its working temperature, and to the gas concentration, automating the acquisition of the current-voltage characteristic and the current-temperature characteristic (Arrhenius plot) of sensing films. The experimental setup was validated by reporting the electrical characterization of a standard metal-oxide-based gas sensing material, such as SnO, working under different thermodynamic conditions.
这项工作展示了一种测量仪器的设计与验证，该仪器用于基于金属氧化物半导体的化学电阻式气体传感器的简便、完整且可调节的特性表征。该设备在硬件和软件方面均有深入描述，旨在监测处于可控热力学条件下的气体传感器的电学行为。此装置的主要目标是使电学特性表征与不同测量条件（即工作温度、相对湿度和目标气体浓度）同步。这种操作使我们能够自动化各种测量协议，否则手动操作无法实现。特别是，该仪器能够将化学电阻式气体传感器的响应与施加电压、工作温度以及气体浓度相关联，自动获取传感薄膜的电流 - 电压特性和电流 - 温度特性（阿仑尼乌斯图）。通过报告一种标准的基于金属氧化物的气体传感材料（如SnO）在不同热力学条件下的电学特性，对实验装置进行了验证。
