Sloyan Karen, Melkonyan Henrik, Apostoleris Harry, Dahlem Marcus S, Chiesa Matteo, Al Ghaferi Amal
Department of Mechanical and Materials Engineering, Khalifa University, SAN Campus, Abu Dhabi 127788, United Arab Emirates.
Laboratory for Energy and Nano Science (LENS), Khalifa University, SAN Campus, Abu Dhabi 127788, United Arab Emirates.
Nanotechnology. 2021 Sep 2;32(47). doi: 10.1088/1361-6528/ac1d75.
Focused ion beam (FIB) technology has become a promising technique in micro- and nano-prototyping due to several advantages over its counterparts such as direct (maskless) processing, sub-10 nm feature size, and high reproducibility. Moreover, FIB machining can be effectively implemented on both conventional planar substrates and unconventional curved surfaces such as optical fibers, which are popular as an effective medium for telecommunications. Optical fibers have also been widely used as intrinsically light-coupled substrates to create a wide variety of compact fiber-optic devices by FIB milling diverse micro- and nanostructures onto the fiber surface (endfacet or outer cladding). In this paper, the broad applications of the FIB technology in optical fibers are reviewed. After an introduction to the technology, incorporating the FIB system and its basic operating modes, a brief overview of the lab-on-fiber technology is presented. Furthermore, the typical and most recent applications of the FIB machining in optical fibers for various applications are summarized. Finally, the reviewed work is concluded by suggesting the possible future directions for improving the micro- and nanomachining capabilities of the FIB technology in optical fibers.
聚焦离子束(FIB)技术因其相较于其他技术具有诸如直接(无掩膜)加工、特征尺寸小于10纳米以及高重现性等诸多优势,已成为微纳原型制作中一项很有前景的技术。此外,FIB加工能够有效地应用于传统平面基板以及诸如光纤等非常规曲面,光纤作为电信领域的一种有效介质而广受欢迎。光纤也已被广泛用作固有光耦合基板,通过在光纤表面(端面或外包层)铣削各种微纳结构,来制造各种各样的紧凑型光纤器件。本文对FIB技术在光纤中的广泛应用进行了综述。在介绍该技术,包括FIB系统及其基本操作模式之后,对光纤上实验室技术作了简要概述。此外,还总结了FIB加工在光纤中用于各种应用的典型及最新应用。最后,通过提出在光纤中提高FIB技术微纳加工能力的可能未来方向,对所综述的工作进行了总结。