Lei Lin, Liu Lin, Lu Xiaomei, Mei Fang, Shen Hui, Hu Xueli, Yan Shuo, Huang Fengzhen, Zhu Jinsong
National Laboratory of Solid State Microstructures and Physics School, Nanjing University, Nanjing 210093, China.
Collaborative Innovation Center of Advanced Microstructures, Nanjing 210093, China.
ACS Appl Mater Interfaces. 2021 Sep 15;13(36):43787-43794. doi: 10.1021/acsami.1c14060. Epub 2021 Sep 1.
In ferroelectric-based integrated devices, there are usually buffer layers between ferroelectric films and semiconductor substrates. Here, BiFeO ( = 95, 100, and 105) (BFO) films are prepared directly on n-Si substrates by the sol-gel method, and the variation of the hysteresis loops with Bi content and heat treatment is investigated. With the help of the dielectric measurement and the composition analysis, a PN heterojunction is believed to exist at the BFO/Si interface. The Bi/Fe ratio determines not only the type and concentration of charged defects in the films but also the height of the interface barrier and its binding effect on mobile charges. Furthermore, the distribution and the migration of charges can be regulated reversibly by heat treatment. This work reveals the interaction between ferroelectric films and semiconductor substrates, providing an important reference for the design and application of ferroelectric/semiconductor heterostructures.
在基于铁电体的集成器件中,铁电薄膜与半导体衬底之间通常存在缓冲层。在此,通过溶胶-凝胶法直接在n型硅衬底上制备了BiFeO(= 95、100和105)(BFO)薄膜,并研究了磁滞回线随铋含量和热处理的变化。借助介电测量和成分分析,认为在BFO/硅界面处存在PN异质结。铋/铁比不仅决定了薄膜中带电缺陷的类型和浓度,还决定了界面势垒的高度及其对移动电荷的束缚作用。此外,通过热处理可以可逆地调节电荷的分布和迁移。这项工作揭示了铁电薄膜与半导体衬底之间的相互作用,为铁电/半导体异质结构的设计和应用提供了重要参考。