Muratov Karim Ravilevich, Ablyaz Timur Rizovich, Gashev Evgeny Anatolevich, Sidhu Sarabjeet Singh, Shlykov Evgeny Sergeevich
Mechanical Engineering Faculty, Perm National Research Polytechnic University, 614000 Perm, Russia.
Mechanical Engineering Department, Sardar Beant Singh State University (Formerly, Beant College of Engineering and Technology), Gurdaspur 143521, India.
Materials (Basel). 2021 Aug 31;14(17):4968. doi: 10.3390/ma14174968.
Recently, the range of crystal materials used in industrial microelectronics has significantly increased. Lithium niobate single crystals are most often used in integrated optics, due to the high values of optical and electro-optical coefficients. An integral-optical circuit based on a lithium niobate single crystal is a key element in the production of local high-precision fiber-optic gyroscopic devices used in civil and military aviation and marine technologies. In the process of production of an integral-optical circuit, the most labor-intensive operations are mechanical processing, such as lapping and polishing. Technological problems that arise while performing these operations are due to the physical and mechanical properties of the material, as well as target surface finish. This work shows the possibility to achieve the required surface quality of lithium niobate single crystal plates by mechanization of lapping and polishing process in this article.
近年来，工业微电子领域中使用的晶体材料范围显著扩大。铌酸锂单晶由于其光学和电光系数值较高，最常用于集成光学领域。基于铌酸锂单晶的集成光学电路是民用和军事航空及海洋技术中使用的局部高精度光纤陀螺装置生产中的关键元件。在集成光学电路的生产过程中，最耗费人力的操作是机械加工，如研磨和抛光。执行这些操作时出现的技术问题是由于材料的物理和机械性能以及目标表面光洁度所致。本文展示了通过对铌酸锂单晶板研磨和抛光过程进行机械化操作来实现所需表面质量的可能性。
