Huang Weiqing, Lian Junkai, Chen Mingyang, An Dawei
School of Mechanical and Electrical Engineering, Guangzhou University, Guangzhou 510006, China.
Micromachines (Basel). 2021 Aug 26;12(9):1013. doi: 10.3390/mi12091013.
Piezoelectric actuators based on bridge displacement amplifying mechanisms are widely used in precision driving and positioning fields. The classical bridge mechanism relies on structural flexibility to realize the return stroke, which leads to the low positioning accuracy of the actuator. In this paper, a series bridge mechanism is proposed to realize a bidirectional active drive; the return stroke is driven by a piezoelectric stack rather than by the flexibility of the structure. By analyzing the parameter sensitivity of the bridge mechanism, the series actuation of the bridge mechanism is optimized and the static and dynamic solutions are carried out by using the finite element method. Compared with the hysteresis loop of the piezoelectric stack, the displacement curve of the proposed actuator is symmetric, and the maximum nonlinear error is improved. The experimental results show that the maximum driving stroke of the actuator is 129.41 μm, and the maximum nonlinear error is 5.48%.
基于桥式位移放大机构的压电驱动器在精密驱动与定位领域有着广泛应用。传统的桥式机构依靠结构柔性来实现回程，这导致驱动器的定位精度较低。本文提出一种串联桥式机构以实现双向主动驱动；回程由压电叠堆驱动而非结构柔性。通过分析桥式机构的参数敏感性，对桥式机构的串联驱动进行优化，并采用有限元方法进行静态和动态求解。与压电叠堆的迟滞回线相比，所提驱动器的位移曲线对称，最大非线性误差得到改善。实验结果表明，该驱动器的最大驱动行程为129.41μm，最大非线性误差为5.48%。
